大型精密光学系统准直误差分析方法及其应用

大型高功率固体激光装置神光III中包括许多大型、精密光学模块，完成各类模块高精度准直是一项巨大的技术挑战。提出了基于光传输建模分析，数值计算、工程实践3个层次相融合的大型光学系统准直误差分析研究方法，并以空间滤波器系统为对象进行了深入的研究与分析。针对模块准直精度建立了带误差传递的光传输模型，借助误差分析方法，分析了主影响因子及权重，结合工程实际，完成了模块光轴精度分解。采用光轴实体化表征技术和齐次矩阵变换方法，实现了模块、光轴、镜片位姿统一表征，结合激光跟踪仪，完成准直平台设计。最后以具有亚毫弧度准直要求的典型光机模块为例，在工程环境下搭建了准直平台，验证了理论分析方法在实际工程中的适用性。这一方法对激光聚变装置中光机模块精密准直技术研究有着普遍指导意义。

Abstract

SG-III power laser facility includes many large aperture optical modules, and it is a huge technical challenge to accomplish precise collimation of those units. A comprehensive error analysis methodology based on integrated light propagation theory, numerical calculation, engineering experience is proposed. Firstly, light transmission function with angle error in each mirror is built up, and the main influence factors are analyzed by means of error theory. Thus error decomposition in each light axis of optical module is employed in according with practical situation. Secondly, light axis materialization and homogeneous matrix transformation methods are utilized to depict the relationship of module, light axis, mirrors in one coordinate system，then the design of collimation stage is accomplished with the help of laser tracker. Finally, a assembling stage of typical module for collimation is set up and validated the proposed methodology which is extremely helpful to study the precise collimation technology in high power laser system.

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