化学气相沉积SiC材料超光滑表面纳米加工
公发全, 肖鹏, 黄润兰, 李刚, 刘万发, 董闯. 化学气相沉积SiC材料超光滑表面纳米加工[J]. 强激光与粒子束, 2007, 19(2): 327.
公发全, 肖鹏, 黄润兰, 李刚, 刘万发, 董闯. Super-smooth surface nanometer fabrication of chemical vapor deposition SiC[J]. High Power Laser and Particle Beams, 2007, 19(2): 327.
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公发全, 肖鹏, 黄润兰, 李刚, 刘万发, 董闯. 化学气相沉积SiC材料超光滑表面纳米加工[J]. 强激光与粒子束, 2007, 19(2): 327. 公发全, 肖鹏, 黄润兰, 李刚, 刘万发, 董闯. Super-smooth surface nanometer fabrication of chemical vapor deposition SiC[J]. High Power Laser and Particle Beams, 2007, 19(2): 327.
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