High-power hybrid GaN-based green laser diodes with ITO cladding layer

Lei Hu; Xiaoyu Ren; Jianping Liu; Aiqin Tian; Lingrong Jiang; Siyi Huang; Wei Zhou; Liqun Zhang; Hui Yang

doi:doi:10.1364/PRJ.381262

Photonics Research, 2020, 8 (3): 03000279, Published Online: Feb. 12, 2020

High-power hybrid GaN-based green laser diodes with ITO cladding layer Download： 684次

Lei Hu ^1,2Xiaoyu Ren ¹Jianping Liu ^1,2,*Aiqin Tian ¹Lingrong Jiang ^1,2Siyi Huang ¹Wei Zhou ¹Liqun Zhang ¹Hui Yang ^1,2

Author Affiliations

¹ Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS), Suzhou 215123, China

² School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China

Figures & Tables

Fig. 1. (a) Structure of the hybrid LD with ITO cladding layer or conventional LD with Pd/Pt/Au electrode. (b) Calculated internal loss of the hybrid LD and conventional LD as a function of p-AlGaN cladding layer thickness. (c) Calculated internal loss of hybrid LDs with various absorption coefficients of ITO layers as a function of p-AlGaN cladding layer thickness.

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Fig. 2. Optical and electrical characteristics of ITO layer. (a) The ellipsometer measurement curves of the annealed ITO layer. (b) The absorption coefficient and refractive index of the ITO layer fitted by the ellipsometer. (c) Current-voltage curves of circular transmission line method test for various electrode spacing. (d) The specific contact resistivity fitting curve.

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Fig. 3. (a) Power–current (P–I) curves of hybrid LDs with ITO cladding layer and conventional LD with Pd/Pt/Au electrode. The P-Al0.08GaN cladding layer thicknesses and electrode are shown in the legends. (b) Lasing spectra of four different kinds of LDs.

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Fig. 4. Integrated electroluminescence intensity as a function of current density in a double logarithmic plot. The intersections of the linear fitting with slopes of 2 and 1 are marked by the dotted lines.

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Fig. 5. (a) P–I curves of ITO LDs with 300 nm different p-AlGaN cladding layers; Al contents are shown in the legends. (b) I–V curves of three different kinds of LDs.

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Fig. 6. P–I curve of ITO LDs with 300 nm p-Al0.035GaN cladding layer. The front facet coating reflectivity is 40%.

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Lei Hu, Xiaoyu Ren, Jianping Liu, Aiqin Tian, Lingrong Jiang, Siyi Huang, Wei Zhou, Liqun Zhang, Hui Yang. High-power hybrid GaN-based green laser diodes with ITO cladding layer[J]. Photonics Research, 2020, 8(3): 03000279.

High-power hybrid GaN-based green laser diodes with ITO cladding layer Download： 684次

Fig. 3. (a) Power–current (P–I) curves of hybrid LDs with ITO cladding layer and conventional LD with Pd/Pt/Au electrode. The P-Al0.08GaN cladding layer thicknesses and electrode are shown in the legends. (b) Lasing spectra of four different kinds of LDs.

Fig. 4. Integrated electroluminescence intensity as a function of current density in a double logarithmic plot. The intersections of the linear fitting with slopes of 2 and 1 are marked by the dotted lines.

Fig. 5. (a) P–I curves of ITO LDs with 300 nm different p-AlGaN cladding layers; Al contents are shown in the legends. (b) I–V curves of three different kinds of LDs.

Fig. 6. P–I curve of ITO LDs with 300 nm p-Al0.035GaN cladding layer. The front facet coating reflectivity is 40%.

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High-power hybrid GaN-based green laser diodes with ITO cladding layer Download： 684次

Fig. 3. (a) Power–current (P–I) curves of hybrid LDs with ITO cladding layer and conventional LD with Pd/Pt/Au electrode. The P-Al0.08GaN cladding layer thicknesses and electrode are shown in the legends. (b) Lasing spectra of four different kinds of LDs.

Fig. 4. Integrated electroluminescence intensity as a function of current density in a double logarithmic plot. The intersections of the linear fitting with slopes of 2 and 1 are marked by the dotted lines.

Fig. 5. (a) P–I curves of ITO LDs with 300 nm different p-AlGaN cladding layers; Al contents are shown in the legends. (b) I–V curves of three different kinds of LDs.

Fig. 6. P–I curve of ITO LDs with 300 nm p-Al0.035GaN cladding layer. The front facet coating reflectivity is 40%.

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