Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique Download: 723次
Engineering Research Center of Optical Instruments and Systems, Ministry of Education and Shanghai Key Laboratory of Modern Optical Systems, University of Shanghai for Science and Technology, Shanghai 200093, China
Figures & Tables
Fig. 1. Measured refractive indexes of Ta2O5 and SiO2.
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Fig. 2. Transmission spectra with different thicknesses of the resonant cavity.
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Fig. 3. Fabrication process flow of the designed LVOF.
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Fig. 4. Schematic diagram of ion beam etching.
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Fig. 5. Schematic diagram of sample and mask.
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Fig. 6. Schematic diagram of sample and split.
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Fig. 7. Measured transmission spectra at different positions.
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Fig. 8. Relationship between position and peak wavelength.
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Bin Sheng, Peng Chen, Chunxian Tao, Ruijin Hong, Yuanshen Huang, Dawei Zhang. Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique[J]. Chinese Optics Letters, 2015, 13(12): 122301.