Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique

Bin Sheng; Peng Chen; Chunxian Tao; Ruijin Hong; Yuanshen Huang; Dawei Zhang

doi:doi:10.3788/COL201513.122301

Chinese Optics Letters, 2015, 13 (12): 122301, Published Online: Sep. 12, 2018

Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique Download： 723次

Bin Sheng Peng Chen ^*Chunxian Tao Ruijin Hong Yuanshen Huang Dawei Zhang

Author Affiliations

Engineering Research Center of Optical Instruments and Systems, Ministry of Education and Shanghai Key Laboratory of Modern Optical Systems, University of Shanghai for Science and Technology, Shanghai 200093, China

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Bin Sheng, Peng Chen, Chunxian Tao, Ruijin Hong, Yuanshen Huang, Dawei Zhang. Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique[J]. Chinese Optics Letters, 2015, 13(12): 122301.