激光与光电子学进展, 2018, 55 (4): 043101, 网络出版: 2018-09-11
多层薄膜沉积的应力仿真分析 
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Stress Simulation Analysis of Multilayer Film Deposition
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李长安, 杨明冬, 全本庆, 关卫林. 多层薄膜沉积的应力仿真分析[J]. 激光与光电子学进展, 2018, 55(4): 043101.
Chang'an Li, Mingdong Yang, Benqing Quan, Weilin Guan. Stress Simulation Analysis of Multilayer Film Deposition[J]. Laser & Optoelectronics Progress, 2018, 55(4): 043101.
李长安, 杨明冬, 全本庆, 关卫林. 多层薄膜沉积的应力仿真分析[J]. 激光与光电子学进展, 2018, 55(4): 043101. Chang'an Li, Mingdong Yang, Benqing Quan, Weilin Guan. Stress Simulation Analysis of Multilayer Film Deposition[J]. Laser & Optoelectronics Progress, 2018, 55(4): 043101.
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