光电子快报(英文版), 2017, 13 (1): 45, Published Online: Sep. 13, 2018
Effects of etching conditions on surface morphology of periodic inverted trapezoidal patterned Si(100) substrate
知识挖掘
ZHANG Lu, YUAN Guo-dong, WANG Qi, WANG Ke-chao, WU Ruiwei, LIU Zhi-qiang, LI Jin-min, WANG Jun-xi. Effects of etching conditions on surface morphology of periodic inverted trapezoidal patterned Si(100) substrate[J]. 光电子快报(英文版), 2017, 13(1): 45.