光学学报, 2012, 32 (7): 0705002, 网络出版: 2012-05-24
全息曝光系统轴向调节误差对光栅衍射波像差的影响
Wavefront Aberration Analysis of the Interference Image According to Different Axis Alignment Errors in the Grating Exposure System
图 & 表
韩建, 巴音贺希格, 李文昊, 孔鹏. 全息曝光系统轴向调节误差对光栅衍射波像差的影响[J]. 光学学报, 2012, 32(7): 0705002. Han Jian, Bayanheshig, Li Wenhao, Kong Peng. Wavefront Aberration Analysis of the Interference Image According to Different Axis Alignment Errors in the Grating Exposure System[J]. Acta Optica Sinica, 2012, 32(7): 0705002.