量子电子学报, 2018, 35 (5): 533, 网络出版: 2018-10-07
基于Smith预估补偿的准分子激光器温度控制系统研究
Temperature control system of excimer laser based on Smith prediction compensation
基本信息
| DOI: | 10.3969/j.issn.1007-5461. 2018.05.004 |
| 中图分类号: | TN248;TP273 |
| 栏目: | 激光技术与器件 |
| 项目基金: | Supported by National Science and Technology Major Project NO. Two(国家科技重大专项02专项, 2013ZX02202) |
| 收稿日期: | 2017-06-19 |
| 修改稿日期: | 2017-09-07 |
| 网络出版日期: | 2018-10-07 |
| 通讯作者: | 朱成林 (zhuchenglin2014@163.com) |
| 备注: | -- |
朱成林, 韩晓泉, 冯泽斌, 胡明庆. 基于Smith预估补偿的准分子激光器温度控制系统研究[J]. 量子电子学报, 2018, 35(5): 533. ZHU Chenglin, HAN Xiaoquan, FENG Zebin, HU Mingqing. Temperature control system of excimer laser based on Smith prediction compensation[J]. Chinese Journal of Quantum Electronics, 2018, 35(5): 533.
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