量子电子学报, 2018, 35 (5): 533, 网络出版: 2018-10-07   

基于Smith预估补偿的准分子激光器温度控制系统研究

Temperature control system of excimer laser based on Smith prediction compensation
作者单位
1 中国科学院光电研究院光电工程部, 北京 100094
2 北京市准分子激光工程技术研究中心, 北京 100094
3 中国科学院大学材料科学与光电技术学院, 北京 100190
4 熊猫电子集团有限公司, 江苏 南京 210007
引用该论文

朱成林, 韩晓泉, 冯泽斌, 胡明庆. 基于Smith预估补偿的准分子激光器温度控制系统研究[J]. 量子电子学报, 2018, 35(5): 533.

ZHU Chenglin, HAN Xiaoquan, FENG Zebin, HU Mingqing. Temperature control system of excimer laser based on Smith prediction compensation[J]. Chinese Journal of Quantum Electronics, 2018, 35(5): 533.

参考文献

[1] Richard C, Robert A, Dmitry Berger, et al. Gas discharge laser with gas temperature control[P]. USA: 2000.

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[4] Hu Mingqing, Han Xiaoquan, Zhou Yi, et al. Design of temperature control system of excimer laser[J]. Chinese Journal of Quantum Electronics (量子电子学报), 2015, 32(4): 432-433(in Chinese).

[5] Delmdahl R F. Power scaling of excimer lasers drivers display and lidar application[J]. Proceeding of SPIE, 2012, 8238: 82380A.

[6] Zhao Jiamin, You Libing, Yu Yinshan, et al. Application and key technology of high energy and high power excimer laser[J]. Chinese Journal of Quantum Electronics (量子电子学报), 2013, 30(6): 696-702(in Chinese).

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[13] Mudi R K, Pal N R. A robust self-tuning scheme for PI and PID type fuzzy controllers[J]. IEEE Transactions on Fuzzy Stystems, 1999, 7(1): 2-16.

朱成林, 韩晓泉, 冯泽斌, 胡明庆. 基于Smith预估补偿的准分子激光器温度控制系统研究[J]. 量子电子学报, 2018, 35(5): 533. ZHU Chenglin, HAN Xiaoquan, FENG Zebin, HU Mingqing. Temperature control system of excimer laser based on Smith prediction compensation[J]. Chinese Journal of Quantum Electronics, 2018, 35(5): 533.

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