光学 精密工程, 2020, 28 (3): 584, 网络出版: 2020-05-12
基于飞秒激光的可运动微结构加工与旋转驱动
Fabrication and rotation driving of movable microstructures based on femtosecond laser
引用该论文
袁宏伟, 饶生龙, 吴东, 李家文, 胡衍雷. 基于飞秒激光的可运动微结构加工与旋转驱动[J]. 光学 精密工程, 2020, 28(3): 584.
YUAN Hong-wei, RAO Sheng-long, WU Dong, LI Jia-wen, HU Yan-lei. Fabrication and rotation driving of movable microstructures based on femtosecond laser[J]. Optics and Precision Engineering, 2020, 28(3): 584.
袁宏伟, 饶生龙, 吴东, 李家文, 胡衍雷. 基于飞秒激光的可运动微结构加工与旋转驱动[J]. 光学 精密工程, 2020, 28(3): 584. YUAN Hong-wei, RAO Sheng-long, WU Dong, LI Jia-wen, HU Yan-lei. Fabrication and rotation driving of movable microstructures based on femtosecond laser[J]. Optics and Precision Engineering, 2020, 28(3): 584.
PDF全文
