膜厚监控误差及监控片不均匀对膜厚监控的影响
朱美萍, 易葵, 郭世海, 范正修, 邵建达. 膜厚监控误差及监控片不均匀对膜厚监控的影响[J]. 光学学报, 2006, 26(7): 1107.
朱美萍, 易葵, 郭世海, 范正修, 邵建达. Effect of Thickness Monitoring Error and Inhomogeneity of Witness Glass on Film Thickness Monitoring[J]. Acta Optica Sinica, 2006, 26(7): 1107.
[4] H. A. Macleod. Thin-Film Optical Filters[M]. London: Institute of Physics Publishing,1999. 40~45
[5] Lin Yuxiang. Research of In-Situ Monitoring System of Optical Thin Film and Reverse[D]. Hangzhou: Zhejiang University,2004. 34~35 (in Chinese)
林雨翔. 光学薄膜厚度实时监控系统及其反演的研究[D]. 杭州: 浙江大学, 2004. 34~35
[6] Gu Peifu. Coating Technology[M]. Hangzhou: Zhejiang University Press,1990. 175~177 (in Chinese)
顾培夫. 薄膜技术[M]. 杭州: 浙江大学出版社, 1990. 175~177
[7] . Zller, R. Gtzelmann, K. Matel et al.. Temperature-stable bandpass filters deposited with ion-assisted deposition[J]. Appl. Opt., 1996, 35(28): 5609-5612.
[8] Gu Peifu. Coating Technology[M]. Hangzhou: Zhejiang University Press,1990. 159~161 (in Chinese)
顾培夫. 薄膜技术[M]. 杭州: 浙江大学出版社,1990. 159~161
朱美萍, 易葵, 郭世海, 范正修, 邵建达. 膜厚监控误差及监控片不均匀对膜厚监控的影响[J]. 光学学报, 2006, 26(7): 1107. 朱美萍, 易葵, 郭世海, 范正修, 邵建达. Effect of Thickness Monitoring Error and Inhomogeneity of Witness Glass on Film Thickness Monitoring[J]. Acta Optica Sinica, 2006, 26(7): 1107.