光学学报, 2006, 26 (7): 1107, 网络出版: 2006-08-28
膜厚监控误差及监控片不均匀对膜厚监控的影响
Effect of Thickness Monitoring Error and Inhomogeneity of Witness Glass on Film Thickness Monitoring
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朱美萍, 易葵, 郭世海, 范正修, 邵建达. 膜厚监控误差及监控片不均匀对膜厚监控的影响[J]. 光学学报, 2006, 26(7): 1107. 朱美萍, 易葵, 郭世海, 范正修, 邵建达. Effect of Thickness Monitoring Error and Inhomogeneity of Witness Glass on Film Thickness Monitoring[J]. Acta Optica Sinica, 2006, 26(7): 1107.