大光栅刻划机气浮刀架导轨设计与分析

尝试在大型衍射光栅刻划机中使用气浮导轨承载金刚石刻划刀具系统运行。气浮导轨同时承担刀具系统的承重与导向任务，由于使用气体作为润滑剂而接近零摩擦状态，可以避免触点磨损及低速爬行现象。分析了气浮导轨工作过程中产生的误差及该误差对刻划刀具运动轨迹的影响，并使用双频激光干涉仪测量刻划过程中刻划刀具运动的直线度误差。测量结果表明，金刚石刀具系统单向行程400 mm 时，该误差约为200 nm，小于使用石英导轨承载刀具系统时的误差，同时在高频振动方面有明显改善。刻制一段79 gr/mm，400 mm×500 mm 的中阶梯光栅，观察其衍射光斑并使用照度计检测得其不同位置杂散光强度为0.2‰~5‰，实验结果表明使用气浮导轨承载刻划刀具可以满足光栅刻划精度要求。

Abstract

We have attempt to use aerostatic guideway to load the diamond carriage system in large diffraction grating ruling engine. Aerostatic guideway undertakes the task of bearing and guiding the diamond carriage system simultaneously. Applying air as lubricant, the friction of aerostatic guideway is approach to zero and can avoid the wear and creeping phenomenon. The motion error of the aerostatic guideway as well as the error′s influence on the diamond carriage system are analyzed. The linear movement accuracy of diamond carriage system during the ruling process is measured with a dual-frequency laser interferometer. The results show that the linear accuracy is about 200 nm on 400 mm one-way trip, less than using quartz guide. Besides, there is a significant improvement in high frequency vibration. An echelle grating with 79 gr/mm and 400 mm×500 mm area has been ruled by this system. The grating′s diffraction spot is displayed and its stray light intensity varies from 0.2‰ to 5‰ in different positions, examining with an illuminometer. The results show that the aerostatic guideway can satisfy the requirements of grating ruling.

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