无基膜高深宽比双面集成微结构元件的制作
徐平, 黄燕燕, 张旭琳, 杨伟, 彭文达. 无基膜高深宽比双面集成微结构元件的制作[J]. 光学 精密工程, 2019, 27(1): 129.
XU Ping, HUANG Yan-yan, ZHANG Xu-lin, YANG Wei, PENG Wen-da. Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate[J]. Optics and Precision Engineering, 2019, 27(1): 129.
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徐平, 黄燕燕, 张旭琳, 杨伟, 彭文达. 无基膜高深宽比双面集成微结构元件的制作[J]. 光学 精密工程, 2019, 27(1): 129. XU Ping, HUANG Yan-yan, ZHANG Xu-lin, YANG Wei, PENG Wen-da. Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate[J]. Optics and Precision Engineering, 2019, 27(1): 129.