光学 精密工程, 2019, 27 (1): 129, 网络出版: 2019-04-06   

无基膜高深宽比双面集成微结构元件的制作

Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate
作者单位
深圳大学 电子科学与技术学院 微纳光电子技术研究所, 广东 深圳 518060
引用该论文

徐平, 黄燕燕, 张旭琳, 杨伟, 彭文达. 无基膜高深宽比双面集成微结构元件的制作[J]. 光学 精密工程, 2019, 27(1): 129.

XU Ping, HUANG Yan-yan, ZHANG Xu-lin, YANG Wei, PENG Wen-da. Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate[J]. Optics and Precision Engineering, 2019, 27(1): 129.

参考文献

[1] 董晓彬, 周天丰, 庞思勤, 等. 玻璃模压成形用微沟槽磷化镍模具的超精密切削加工[J]. 光学 精密工程, 2017, 25(12): 2986-2993.

    DONG X B, ZHOU T F, PANG S Q, et al.. Ultraprecision microgroove maching of nickle phosphorous plating mold for glass molding [J]. Opt. Precision Eng., 2017, 25(12): 2986-2993. (in Chinese)

[2] 褚金奎, 康维东, 曾祥伟, 等. 基于柔性纳米压印工艺制备中红外双层金属纳米光栅[J]. 光学 精密工程, 2017, 25(12): 3034-3040.

    CHU J K, KANG W D, ZENG X W, et al.. Fabrication of bilayer metallic nano gratings in mid-infrared region based on flexible nanoimprint lithography [J]. Opt. Precision Eng., 2017, 25(12): 3034-3040. (in Chinese)

[3] 孟繁斐, 步敬. 集成成像系统中高填充率微透镜阵列的设计与加工[J]. 光学 精密工程, 2017, 25(8): 2130-2138.

    MENG F F, BU J. Design and fabrication for micro-lens array with high fill factor in integral imaging system [J]. Opt. Precision Eng., 2017, 25(8): 2130-2138. (in Chinese)

[4] 刘民哲, 王泰升, 李和福, 等. 静电场辅助的微压印光刻技术[J]. 光学 精密工程, 2017, 25(3): 663-671.

    LIU M ZH, WANG T SH, LI H F, et al.. Electrostatic field assisted micro imprint lithography technology [J]. Opt. Precision Eng., 2017, 25(3): 663-671. (in Chinese)

[5] STEENBLIK R A, HURT M J, JORDAN G R. Micro-optics security and image presentation system: US, US 7333268B2 [P]. 2008-02-19.

[6] STEENBLIK R A, HURT M J, JORDAN G R. Image presentation and micro-optic security system: US, US 7468842B2 [P]. 2008-12-23.

[7] CRANE T T, MORCK-HAMILTON K, MARASCHI M, et al.. Micro-optic film structure that alone or together with a security document or label projects images spatially coordinated with static images and/or other projected images: US, US 8284492B2 [P]. 2012-10-09.

[8] STEENBLIK R A, HURT M J, JORDAN G R. Micro-optics security and image presentation system for a security device: US, US 8120855B2 [P]. 2012-02-21.

[9] DRINKWATER K J, HUDSON P M G. Security device for security documents such as bank notes and credit cards: US, US 5712731 [P]. 1998-01-27.

[10] COMMANDER L G, EASTELL C J, ISHERWOOD R, et al.. Optically variable devices: US, US 7830627B2 [P]. 2010-11-09.

[11] XU P, HUANG Y Y, ZHANG X L, et al.. Integrated micro-optical light guide plate [J]. Optics Express, 2013, 21(17): 20159-20170.

[12] XU P, HUANG Y Y, SU Z J, et al.. Research of micro-prism distribution on the bottom surface of the small-size integrated light guide plate [J]. Optics Express, 2015, 23(4): 4887-4896.

[13] PAN J W, HU Y W. Design of a hybrid light guiding plate with high luminance for backlight system application [J]. Journal of Display Technology, 2013, 9(12): 965-971.

[14] CHEN C F, KUO S H. A highly directional light guide plate based on V-groove microstructure cell [J]. Journal of Display Technology, 2014, 10(12): 1030-1035.

[15] TENG T C, KE J C. A novel optical film to provide a highly collimated planar light source [J]. Optics Express, 2013, 21(18): 21444-21455.

[16] SIITONEN S, LAAKKONEN P, TERVO J, et al.. A double-sided grating coupler for thin light guides [J]. Optics Express, 2007, 15(5): 2008-2018.

[17] XU P, CHEN X X, HUANG J F, et al.. A novel highly-integrated light guide plate using micro optical technique [C]. SPIE, 2007, 6834: 683409.

[18] XU P, HUANG Y Y, SU Z J, et al.. Algorithm research on microstructure distribution on the bottom surface of an integrated micro-optical light guide plate [J]. Applied Optics, 2014, 53(7): 1322-1327.

[19] FENG D, JIN G F, YAN Y B, et al.. High quality light guide plates that can control the illumination angle based on microprism structures [J]. Applied Physics Letters, 2004, 85(24): 6016-6018.

[20] YANG X P, YAN Y B, JIN G F. Polarized light-guide plate for liquid crystal display [J]. Optics Express, 2005, 13(21): 8349-8356.

[21] 张静芳, 刘立民, 叶中东, 等. 光学防伪技术及其应用[M]. 北京: 国防工业出版社, 2011.

    ZHANG J F, LIU L M, YE ZH D, et al.. Optical Anti-Counterfeiting Technology and Its Application [M]. Beijing: National Defense Industry Press, 2011. (in Chinese)

[22] 金养智. 光固化材料性能及应用手册[M]. 北京: 化学工业出版社, 2010.

    JIN Y Z. Light Curing Material Performance and Application Manual [M]. Beijing: Chemical Industry Press, 2010. (in Chinese)

徐平, 黄燕燕, 张旭琳, 杨伟, 彭文达. 无基膜高深宽比双面集成微结构元件的制作[J]. 光学 精密工程, 2019, 27(1): 129. XU Ping, HUANG Yan-yan, ZHANG Xu-lin, YANG Wei, PENG Wen-da. Fabrication of two-sided integrated microstructure element with high aspect ratio and without film substrate[J]. Optics and Precision Engineering, 2019, 27(1): 129.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!