光学学报, 2014, 34 (s1): s112004, 网络出版: 2014-07-03
基于斜率传感的平面元件面形检测技术研究
Study on the Surface Shape Measurement of Planar Element Based on Slope Sensor Method
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鄂可伟, 李大海, 李萌阳, 赵霁文, 李水艳, 张充, 代贞强, 王琼华. 基于斜率传感的平面元件面形检测技术研究[J]. 光学学报, 2014, 34(s1): s112004. E Kewei, Li Dahai, Li Mengyang, Zhao Jiwen, Li Shuiyan, Zhang Chong, Dai Zhenqiang, Wang Qionghua. Study on the Surface Shape Measurement of Planar Element Based on Slope Sensor Method[J]. Acta Optica Sinica, 2014, 34(s1): s112004.
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