MOCVD生长Si衬底上HT-AlN缓冲层低生长压力对GaN薄膜的影响
韩军, 赵佳豪, 邢艳辉, 史峰峰, 杨涛涛, 赵杰, 王凯, 李焘, 邓旭光, 张宝顺. MOCVD生长Si衬底上HT-AlN缓冲层低生长压力对GaN薄膜的影响[J]. 发光学报, 2018, 39(9): 1285.
HAN Jun, ZHAO Jia-hao, XING Yan-hui, SHI Feng-feng, YANG Tao-tao, ZHAO Jie, WANG Kai, LI Tao, DENG Xu-guang, ZHANG Bao-shun. Effect of Low Growth Pressure of HT-AlN Buffer on GaN Epilayer Grown on Si(111)[J]. Chinese Journal of Luminescence, 2018, 39(9): 1285.
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韩军, 赵佳豪, 邢艳辉, 史峰峰, 杨涛涛, 赵杰, 王凯, 李焘, 邓旭光, 张宝顺. MOCVD生长Si衬底上HT-AlN缓冲层低生长压力对GaN薄膜的影响[J]. 发光学报, 2018, 39(9): 1285. HAN Jun, ZHAO Jia-hao, XING Yan-hui, SHI Feng-feng, YANG Tao-tao, ZHAO Jie, WANG Kai, LI Tao, DENG Xu-guang, ZHANG Bao-shun. Effect of Low Growth Pressure of HT-AlN Buffer on GaN Epilayer Grown on Si(111)[J]. Chinese Journal of Luminescence, 2018, 39(9): 1285.
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