用于生物传感的相位调制的铝膜-石墨烯结构

李勇萍; 刘军贤; 袁玉峰

doi:doi:10.3788/gzxb20204907.0724002

光子学报, 2020, 49 (7): 0724002, 网络出版: 2020-08-25

用于生物传感的相位调制的铝膜-石墨烯结构

Aluminum-graphene Structure Based on Phase Modulation Employed for Biosensing

李勇萍 ¹刘军贤 ¹袁玉峰 ^2,*

作者单位

¹ 广西师范大学物理科学与技术学院, 广西桂林 541004

² 深圳大学物理与光电工程学院, 广东深圳 518061

图 & 表

图 1. 铝⁃石墨烯结构表面等离子共振传感器示意图

Fig. 1. Schematic diagram of Al⁃Graphene SPR sensor

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图 2. 不同金属膜的模拟曲线

Fig. 2. The simulation curves of different metal films

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图 3. 不同厚度铝膜随石墨烯层数变化的模拟曲线（激发波长为632.8 nm；传感介质折射率为1.333）

Fig. 3. The simulation curves of different Al film thicknesses with the number of graphene layers (The excitation wavelength is 632.8 nm and the sensing layer refractive index is 1.333)

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图 4. 29 nm铝、29 nm铝/5层石墨烯结构激发强SPR共振的电场强度变化情况

Fig. 4. Variation of electric field strength of 29 nm Al and 29 nm Al /5⁃layer graphene structure that excites strong SPR resonance

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图 5. 传感结构相位变化和反射曲线（激发波长为632.8 nm；传感介质折射率为1.333）

Fig. 5. Phase change and reflection curves based on the optimal configuration (the excitation wavelength is 632.8 nm and the sensing layer refractive index is 1.333)

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图 6. 相位差、共振角差随石墨烯层数和铝膜厚度变化曲线（激发波长为632.8 nm；传感介质折射率设定为1.333

Fig. 6. Curves of difference phase and SPR angle shift with the number of graphene layers and the thickness of the aluminum film (the excitation wavelength is 632.8 nm and the sensing layer refractive index 1.333)

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图 7. 差分相位随样品折射率的变化情况（激发波长为632.8 nm）

Fig. 7. Variation of differential phase with respect to sensing layer refractive index (the excitation wavelength is 632.8 nm)

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表 1不同传感结构配置的相位差(Δφ_d)和相位灵敏度

Table1. Differential phase(Δφ_d) and phase sensitivity of different sensing configuration

Al thickness	Number of graphene layers	Δφ_d (Δn_bio = 0.001 2)	S_p
27 nm	7	78.486^o	6.540 4×10 ⁴^o/RIU
28 nm	6	79.457 ^o	6.621 4×10⁴^o/RIU
29 nm	5	94.663 ^o	7.888 5×10⁴^o/RIU
30 nm	4	93.739 ^o	7.811 5×10⁴^o/RIU
31 nm	4	67.939 ^o	5.661 5×10⁴^o/RIU

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表 2不同调制方式的铝金属SPR传感器灵敏度

Table2. Sensitivity of Al metal SPR sensor with different modulation modes

Ref.	Detection medium	Sensitivity	Wavelength/nm
[5]	Angle	190 ^o/RIU	633
[8]	Wavelength	180 nm/RIU	1 400
[13]	Intensity	942 ^o/RIU	638.2
This study	Phase	78 885 ^o/RIU	632.8

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李勇萍, 刘军贤, 袁玉峰. 用于生物传感的相位调制的铝膜-石墨烯结构[J]. 光子学报, 2020, 49(7): 0724002. Yong-ping LI, Jun-xian LIU, Yu-feng YUAN. Aluminum-graphene Structure Based on Phase Modulation Employed for Biosensing[J]. ACTA PHOTONICA SINICA, 2020, 49(7): 0724002.

用于生物传感的相位调制的铝膜-石墨烯结构

图 1. 铝⁃石墨烯结构表面等离子共振传感器示意图

Fig. 1. Schematic diagram of Al⁃Graphene SPR sensor

图 2. 不同金属膜的模拟曲线

Fig. 2. The simulation curves of different metal films

图 3. 不同厚度铝膜随石墨烯层数变化的模拟曲线（激发波长为632.8 nm；传感介质折射率为1.333）

Fig. 3. The simulation curves of different Al film thicknesses with the number of graphene layers (The excitation wavelength is 632.8 nm and the sensing layer refractive index is 1.333)

图 4. 29 nm铝、29 nm铝/5层石墨烯结构激发强SPR共振的电场强度变化情况

Fig. 4. Variation of electric field strength of 29 nm Al and 29 nm Al /5⁃layer graphene structure that excites strong SPR resonance

图 5. 传感结构相位变化和反射曲线（激发波长为632.8 nm；传感介质折射率为1.333）

Fig. 5. Phase change and reflection curves based on the optimal configuration (the excitation wavelength is 632.8 nm and the sensing layer refractive index is 1.333)

图 6. 相位差、共振角差随石墨烯层数和铝膜厚度变化曲线（激发波长为632.8 nm；传感介质折射率设定为1.333

Fig. 6. Curves of difference phase and SPR angle shift with the number of graphene layers and the thickness of the aluminum film (the excitation wavelength is 632.8 nm and the sensing layer refractive index 1.333)

图 7. 差分相位随样品折射率的变化情况（激发波长为632.8 nm）

Fig. 7. Variation of differential phase with respect to sensing layer refractive index (the excitation wavelength is 632.8 nm)

表 1不同传感结构配置的相位差(Δφ_d)和相位灵敏度

Table1. Differential phase(Δφ_d) and phase sensitivity of different sensing configuration

表 2不同调制方式的铝金属SPR传感器灵敏度

Table2. Sensitivity of Al metal SPR sensor with different modulation modes

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用于生物传感的相位调制的铝膜-石墨烯结构

图 1. 铝⁃石墨烯结构表面等离子共振传感器示意图

Fig. 1. Schematic diagram of Al⁃Graphene SPR sensor

图 2. 不同金属膜的模拟曲线

Fig. 2. The simulation curves of different metal films

图 3. 不同厚度铝膜随石墨烯层数变化的模拟曲线（激发波长为632.8 nm；传感介质折射率为1.333）

Fig. 3. The simulation curves of different Al film thicknesses with the number of graphene layers (The excitation wavelength is 632.8 nm and the sensing layer refractive index is 1.333)

图 4. 29 nm铝、29 nm铝/5层石墨烯结构激发强SPR共振的电场强度变化情况

Fig. 4. Variation of electric field strength of 29 nm Al and 29 nm Al /5⁃layer graphene structure that excites strong SPR resonance

图 5. 传感结构相位变化和反射曲线（激发波长为632.8 nm；传感介质折射率为1.333）

Fig. 5. Phase change and reflection curves based on the optimal configuration (the excitation wavelength is 632.8 nm and the sensing layer refractive index is 1.333)

图 6. 相位差、共振角差随石墨烯层数和铝膜厚度变化曲线（激发波长为632.8 nm；传感介质折射率设定为1.333

Fig. 6. Curves of difference phase and SPR angle shift with the number of graphene layers and the thickness of the aluminum film (the excitation wavelength is 632.8 nm and the sensing layer refractive index 1.333)

图 7. 差分相位随样品折射率的变化情况（激发波长为632.8 nm）

Fig. 7. Variation of differential phase with respect to sensing layer refractive index (the excitation wavelength is 632.8 nm)

表 1不同传感结构配置的相位差(Δφd)和相位灵敏度

Table1. Differential phase(Δφd) and phase sensitivity of different sensing configuration

表 2不同调制方式的铝金属SPR传感器灵敏度

Table2. Sensitivity of Al metal SPR sensor with different modulation modes

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表 1不同传感结构配置的相位差(Δφ_d)和相位灵敏度

Table1. Differential phase(Δφ_d) and phase sensitivity of different sensing configuration