强激光与粒子束, 2015, 27 (2): 024103, 网络出版: 2015-02-15
基于NOA73微球与SU-8微柱的微探针制作
Fabrication of microprobe based on NOA73 and SU-8
基本信息
| DOI: | 10.11884/hplpb201527.024103 |
| 中图分类号: | TH706 |
| 栏目: | |
| 项目基金: | surpported by National Science Foundation of China(61401405, 51475438)、Basic Research Priorities Program of Shanxi (2014011021-4)、Program for New Century Excellent Talents in University (130951862) |
| 收稿日期: | 2014-09-14 |
| 修改稿日期: | 2014-10-13 |
| 网络出版日期: | 2015-02-15 |
| 通讯作者: | 王伟 (wwsi14@foxmail.com) |
| 备注: | -- |
王伟, 贾志浩, 段俊萍, 崔建利, 徐苏坪, 张斌珍. 基于NOA73微球与SU-8微柱的微探针制作[J]. 强激光与粒子束, 2015, 27(2): 024103. Wang Wei, Jia Zhihao, Duan Junping, Cui Jianli, Xu Suping, Zhang Binzhen. Fabrication of microprobe based on NOA73 and SU-8[J]. High Power Laser and Particle Beams, 2015, 27(2): 024103.
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