强激光与粒子束, 2015, 27 (2): 024103, 网络出版: 2015-02-15
基于NOA73微球与SU-8微柱的微探针制作
Fabrication of microprobe based on NOA73 and SU-8
图 & 表
王伟, 贾志浩, 段俊萍, 崔建利, 徐苏坪, 张斌珍. 基于NOA73微球与SU-8微柱的微探针制作[J]. 强激光与粒子束, 2015, 27(2): 024103. Wang Wei, Jia Zhihao, Duan Junping, Cui Jianli, Xu Suping, Zhang Binzhen. Fabrication of microprobe based on NOA73 and SU-8[J]. High Power Laser and Particle Beams, 2015, 27(2): 024103.