用于非球面检验的激光直写高精度计算全息图制作

为实现高精度非球面的面形误差检测，对激光直写计算全息图（CGH）的关键技术进行研究。以获得最小线宽偏差为目的，通过基础工艺实验，探究离焦量对光刻胶上线宽的影响；研究湿法刻蚀过程对不同线宽引入的展宽规律；分析线宽误差与位置误差关系，得到CGH 不同周期位置误差引入的波前误差。根据实验结果，制作最小线宽1.8 mm，直径80 mm 的振幅型CGH。检测结果表明，波前误差均方根值为0.011l，达到l/100 量级，可用于高精度非球面的检测。

Abstract

In order to realize high-precision testing of aspherical surface, the key technology for fabricating computer generated hologram (CGH) by laser-direct writing (DWL) is studied in this paper. To obtain the minimum line-width deviation, the influences of defocus and the wet-etching processes on the line-width are firstly investigated. The position errors under different line-widths are obtained by analyzing the relationship of line-width error and the position error. According to the above-obtained results, a CGH with diameter of 80 mm and the minimum line-width of 1.8 mm is successfully fabricated. Testing results show that the wavefront error is only 0.011l, achieving the l/100 level. The fabricated CGH is expected to be used in the high-precision testing of asphercal surfaces.

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赵龙波, 张志宇, 朱德燕, 延超, 郑立功, 张学军. 用于非球面检验的激光直写高精度计算全息图制作[J]. 激光与光电子学进展, 2014, 51(11): 110902. Zhao Longbo, Zhang Zhiyu, Zhu Deyan, Wang Yanchao, Zheng Ligong, Zhang Xuejun. Fabrication of High Precision Computer Generated Hologram for Aspheric Surface Testing by Laser-Direct Writing[J]. Laser & Optoelectronics Progress, 2014, 51(11): 110902.

用于非球面检验的激光直写高精度计算全息图制作

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