热丝CVD沉积金刚石薄膜过程中的发射光谱研究
易成, 王传新, 熊江, 范咏志, 汪建华, 马志斌, 满卫东, 王升高. 热丝CVD沉积金刚石薄膜过程中的发射光谱研究[J]. 激光与光电子学进展, 2015, 52(10): 103003.
Yi Cheng, Wang Chuanxin, Xiong Jiang, Fan Yongzhi, Wang Jianhua, Ma Zhibin, Man Weidong, Wang Shenggao. Analysis of Optical Emission Spectroscopy in Diamond of Hot Filament Chemical Vapor Deposition[J]. Laser & Optoelectronics Progress, 2015, 52(10): 103003.
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易成, 王传新, 熊江, 范咏志, 汪建华, 马志斌, 满卫东, 王升高. 热丝CVD沉积金刚石薄膜过程中的发射光谱研究[J]. 激光与光电子学进展, 2015, 52(10): 103003. Yi Cheng, Wang Chuanxin, Xiong Jiang, Fan Yongzhi, Wang Jianhua, Ma Zhibin, Man Weidong, Wang Shenggao. Analysis of Optical Emission Spectroscopy in Diamond of Hot Filament Chemical Vapor Deposition[J]. Laser & Optoelectronics Progress, 2015, 52(10): 103003.
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