光学学报, 2013, 33 (6): 0612009, 网络出版: 2013-05-14   

提高S变换轮廓术测量精度的方法

Method for Improving the Accuracy of S-Transform Profilometry
作者单位
四川大学电子信息学院光电科学技术系, 四川 成都 610064
引用该论文

谌秋菊, 陈文静, 钟敏, 苏显渝. 提高S变换轮廓术测量精度的方法[J]. 光学学报, 2013, 33(6): 0612009.

Shen Qiuju, Chen Wenjing, Zhong Min, Su Xianyu. Method for Improving the Accuracy of S-Transform Profilometry[J]. Acta Optica Sinica, 2013, 33(6): 0612009.

参考文献

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谌秋菊, 陈文静, 钟敏, 苏显渝. 提高S变换轮廓术测量精度的方法[J]. 光学学报, 2013, 33(6): 0612009. Shen Qiuju, Chen Wenjing, Zhong Min, Su Xianyu. Method for Improving the Accuracy of S-Transform Profilometry[J]. Acta Optica Sinica, 2013, 33(6): 0612009.

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