激光共焦透镜轴向间隙测量方法

镜组内各透镜间的轴向间隙是光学系统装配中的一个重要参数。为精确测量镜组内各透镜间的轴向间隙，提出了一种激光共焦镜组间隙测量方法。该方法利用共焦光强响应曲线的峰值点对应系统物镜聚焦焦点这一特性，使用环形激光共焦层析定焦技术对装配后镜组内各透镜表面的顶点位置进行高精度定位，并结合光学追迹方法精确计算各个透镜表面顶点之间的距离，继而得到镜组的轴向间隙。初步的实验表明该方法的重复性可达到0.3 μm 。

Abstract

The axial space between lenses is an important parameter for the assembling of lenses. In order to achieve the precise measurement of the lenses axial space, a laser confocal lenses axial space measurement (LCASM) is proposed. Using the character that the peak point of confocal response curve correspond to the focus of system objective, LCASM utilizes the annular laser confocal chromatography focusing technique (ACFT) to precisely identify the vertex position of an assembled lenses on the inner-and-outer spherical surface, then uses the ray tracing facet iterative algorithm to precisely determine the vertex position, and thereby obtaining the lenses axial space. The preliminary experiments indicate that LCASM has measurement repeatability of 0.3 μm.

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赵维谦, 沈阳, 邱丽荣, 杨佳苗. 激光共焦透镜轴向间隙测量方法[J]. 激光与光电子学进展, 2015, 52(3): 031205. Zhao Weiqian, Shen Yang, Qiu Lirong, Yang Jiamiao. Lenses Axial Space Measurement by Laser Confocal Technology[J]. Laser & Optoelectronics Progress, 2015, 52(3): 031205.

激光共焦透镜轴向间隙测量方法

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