红外/可见光宽带分色片设计与制备

林炳; 于天燕; 刘定权; 张凤山

红外与毫米波学报, 2004, 23 (5): 393, 网络出版: 2006-05-10

红外/可见光宽带分色片设计与制备

DESIGN AND DEPOSITION OF INFRARED/VISIBLE WIDE-BAND COLOR SEPARATION FILTERS

论文大纲

林炳于天燕刘定权张凤山

作者单位

中国科学院上海技术物理研究所,光学薄膜与材料研究室,上海,200083

光学薄膜分色片诱导增透 optical thin film color separation filter induced transmission

摘要

红外、可见光分色片对成像光谱技术起着至关重要的作用,应用诱导增透概念设计宽光谱分色片,并在薄膜制备过程中,采用了光学控制结合晶体振荡控制的方法获得了符合实用要求的红外/可见分色片,其400nm～900nm范围45度入射光透过率大于80%,在1325nm～13000nm平均反射率大于90%,其光谱特性在已报道过的同类分色片中位于前沿.

Abstract

Infrared/visible color separation filters take an important role in imaging spectrum technique. We applied the concept of induced transmission to design the filter, and combined optical distinguish method and quartz crystal monitor XTC-2 technique to control the thickness of each coating accurately. Finally the satisfied wide bandwidth filter was obtained. Its spectrum result is in the front of the same kind of filters reported before.

参考文献

[1] LI Heng-Yi, LI Qiong-Rui. Design of wide-band color separation filter with 0.4-1.1μm high transmission and 3-15μm high reflection[J]. Laser & Infrared, (李恒义,李琼瑞,0.4-1.1微米高透、3-15微米高反的宽带光谱分色片的设计,激光与红外), 1979, 10: 1-11.

[2] TAN Jin-Fa, ZHENG Quan.Applied Thin Film Optics[M].Shanghai: Science Press Shanghai (唐晋发,郑权.应用薄膜光学,上海:上海科学出版社), 1980, 270-285.

[3] JIANG Zhen-Zi, JIANG Feng-Wen. Characteristic analysis and preparation of induced transmission filters[J]. Optics & Machenics, (姜贞子,姜凤文,诱导透射滤光片特性分析与制备,光学机械), 1990, 113(2): 28-32.

[4] MI Qian, LIU Wei-Guo, Realization and base process of color separation filter[J]. Journal of XiAn University of Technology, (弥谦,李卫国,分色滤光片的实现及基本工艺,西安工业学院学报), 1997, 17(2): 117-120.

[5] . Reflectivity of metallic films in the infrared[J]. Journal of Optical Society of America., 1977, 67(7): 908-910.

林炳, 于天燕, 刘定权, 张凤山. 红外/可见光宽带分色片设计与制备[J]. 红外与毫米波学报, 2004, 23(5): 393. 林炳, 于天燕, 刘定权, 张凤山. DESIGN AND DEPOSITION OF INFRARED/VISIBLE WIDE-BAND COLOR SEPARATION FILTERS[J]. Journal of Infrared and Millimeter Waves, 2004, 23(5): 393.

红外/可见光宽带分色片设计与制备

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