[1] 张晓峰, 赵鹤鸣, 钱 磊, 等. 基于参数激励法的MEMS陀螺电馈通抑制方法[J]. 传感器与微系统, 2019, 38(5): 26-28.

    Zhang Xiaofeng, Zhao Heming, Qian Lei, et al. Electrical feed-through suppressing method for MEMS gyroscope based on parametric excitation[J]. Sensors and Microsystems, 2019, 38(5): 26-28.

[2] 苏小波. 振动环型MEMS陀螺仪的研究与相关设计[D]. 无锡: 江南大学, 2011.

    Su Xiaobo. Research and relevant design of vibrating ring MEMS gyroscope[D]. Wuxi: Jiangnan University, 2011.

[3] 张钰莹, 张卫平, 崔 峰, 等. 基于FPGA的压电半球谐振陀螺数字测控系统设计[J]. 半导体光电, 2019, 40(3): 313-317.

    Zhang Yuying, Zhang Weiping, Cui Feng, et al. Design of digital detection and control system of the piezoelectric hemisphere resonant gyro based on FPGA[J]. Semiconductor Optoelectronics, 2019, 40(3): 313-317.

[4] Mayberry Curtis. Interface circuits for readout and control of a micro-hemispherical resonating gyroscope[D]. Georgia: Georgia Institute of Technol., 2014.

[5] Zhang H, Yuan W, Hao Y, et al. Influences of the feedthrough capacitance on the frequency synchronization of the weakly coupled resonators[J]. IEEE Sensors J., 2015, 15(11): 6081-6088.

[6] Kangul M, Aydin E, Gokce F, et al. Analysis and elimination of the capacitive feedthrough current on electrostatically actuated and sensed resonance-based MEMS sensors[J]. J. of Microelectromechanical Systems, 2017, 26(6): 1-7.

[7] Iqbal F, Shah M A, Lee B. Analysis of parasitic feed-through capacitance in MEMS gyroscope with push pull configuration[C]//IEEE 12th Inter. Conf. on Nano/Micro Engin. and Molecular Systems (NEMS), 2017.

[8] Xu Y, Lee J E Y. Feedthrough cancellation in micromechanical square resonators via differential transduction[C]// IEEE Electron Devices & Solid-state Circuits, 2010.

[9] Lee E Y, Seshia A A. Parasitic feedthrough cancellation techniques for enhanced electrical characterization of electrostatic microresonators[J]. Sensors and Actuators: A Physical, 2009, 156(1): 36-42.

[10] Ali A, Lee E Y. Single device on-chip feedthrough cancellation for enhanced electrical characterization of piezoelectric-on-silicon resonators in liquid[J]. Sensors and Actuators A: Physical, 2017, 260: 131-138.