测量薄膜厚度的数字叠栅技术
苏俊宏, 刘奕辰. 测量薄膜厚度的数字叠栅技术[J]. 中国激光, 2012, 39(11): 1108002.
Su Junhong, Liu Yichen. Digital Moiré Technique for Thin Film Thickness Measurement[J]. Chinese Journal of Lasers, 2012, 39(11): 1108002.
[1] J. E. Greivenkamp, J. H. Bruning. "Phase Shifting Interferometers" in Optical Shop Testing[M]. D. Malacara ed. New York: John Wiley & Sons, Inc., 1992. 501~598
[2] C. C. Hsu, J. Y. Lee, D. C. Su. Thickness and optical constants measurement of thin film growth with circular heterodyne interferometry[J]. Thin Solid Films, 2005, 491(1-2): 91~95
[3] A. Lewis. Measurement of length, surface form and thermal expansion coefficient of length bars up to 1.5 m using multiple-wavelength phase-stepping interferometry[J]. Meas. Sci. & Technol., 1994, 5(6): 694~703
[4] 朱日宏, 陈磊, 王青 等. 移相干涉测量术及其应用[J]. 应用光学, 2006, 27(2): 85~88
Zhu Rihong, Chen Lei, Wang Qing et al.. Phase-shift interferometry and its application[J]. Journal of Applied Optics, 2006, 27(2): 85~88
[5] 万文博, 苏俊宏, 杨利红 等. 干涉条纹图像处理的相位解包新方法[J]. 应用光学, 2011, 32(1): 70~74
[6] 石一磊, 苏俊宏, 杨利红 等. 基于相位偏移干涉术的薄膜厚度测量方法[J]. 应用光学, 2009, 30(1): 76~79
苏俊宏, 刘奕辰. 测量薄膜厚度的数字叠栅技术[J]. 中国激光, 2012, 39(11): 1108002. Su Junhong, Liu Yichen. Digital Moiré Technique for Thin Film Thickness Measurement[J]. Chinese Journal of Lasers, 2012, 39(11): 1108002.