光子学报, 2010, 39 (9): 1543, 网络出版: 2010-11-04
光溅射镀膜均匀性的优化模拟
Optimal Simulation for the Thickness Uniformity of the Film Deposited by Pulse Laser Sputtering
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王晟, 叶景峰, 刘晶儒, 白婷, 叶锡生, 王立君. 光溅射镀膜均匀性的优化模拟[J]. 光子学报, 2010, 39(9): 1543. WANG Sheng, YE Jing-feng, LIU Jing-ru, BAI Ting, YE Xi-sheng, WANG Li-jun. Optimal Simulation for the Thickness Uniformity of the Film Deposited by Pulse Laser Sputtering[J]. ACTA PHOTONICA SINICA, 2010, 39(9): 1543.
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