基于激光二维散射原理在线测量表面粗糙度

针对现有零件表面粗糙度测量仪器操作复杂, 现场测量能力差的问题, 提出一种基于激光二维散射的在线测量方法, 该方法不仅可以测量表面粗糙度的统计参数, 而且可以反映出表面纹理的形貌特征。在测量中, 用无衍射激光光束作光源, 用高精度的 CCD摄像机作位移传感器, 利用 Matlab进行表面粗糙度测量数据采集与处理, 使表面粗糙度在线检测成为可能。该方法运用模块化设计, 具有结构简单、实时处理能力强、测试精度高、显示结果直观、不会划伤被测件等优点。

Abstract

Referring to the complicated operating and bad field measuring of existing surface roughness, an on-line measurement method is presented based on laser two-dimensional scattering principle. The method proposed can not only measure the surface roughness parameters, but also figure out the surface topography. In this measurement, by using non-diffraction laser beam as light source and high accuracy CCD camera as displacement sensor, and applying the method of signal processing of surface roughness by Matlab, real-time measurement of surface roughness can be realized. This method is realized with modularized design, and has the advantages of simple structure, powerful real-time processing capability, high-precision measurement, visual display, and easy operation, etc.

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张秋佳, 赵玉华, 韩冬, 余平, 刘明珠. 基于激光二维散射原理在线测量表面粗糙度[J]. 光电工程, 2011, 38(6): 110. ZHANG Qiu-jia, ZHAO Yu-hua, HAN Dong, YU Ping, LIU Ming-zhu. On-line Measurement of Surface Roughness Based on Laser Two-dimensional Scattering Principle[J]. Opto-Electronic Engineering, 2011, 38(6): 110.

基于激光二维散射原理在线测量表面粗糙度

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