镀铬基片全息光栅光刻胶掩模槽形参量光谱检测方法
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陈刚, 吴建宏, 陈新荣, 刘全. 镀铬基片全息光栅光刻胶掩模槽形参量光谱检测方法[J]. 中国激光, 2006, 33(6): 800. 陈刚, 吴建宏, 陈新荣, 刘全. Measurement of Profile Parameters of Holographic Photoresist Grating Mask Made on Top of Chrome Stack in Spectroscopic Way[J]. Chinese Journal of Lasers, 2006, 33(6): 800.