全内反射技术检测大口径光学元件体内缺陷

为有效检测光学元件体内的缺陷情况, 利用全内反射技术, 让激光束在光学元件内部多次全内反射后获得缺陷的散射光斑图像, 结合基于最小二乘法的椭圆拟合等方法对散射图像进行处理, 得到缺陷的三维位置信息。对该方法进行了实验验证, 实验结果表明, 扫描采集35幅图像即可完成对尺寸为150 mm×120 mm×20 mm的大口径光学元件的全部缺陷检测, 待测样品缺陷点的深度位置定位精度优于150 μm, 说明该方法可以有效检测大口径光学元件缺陷点。针对可能影响实验结果的误差来源和限制系统分辨率的因素进行了分析, 结果表明提高成像系统横向分辨率或减小激光束横截面宽度均可有效地提高系统的分辨率。

Abstract

In order to detect the internal defects of the optics effectively, the scattering images of the defects are obtained after multiple total internal reflections of the laser beam in optics using total internal reflection technique. The three-dimensional position information of the defect is obtained by image processing technique, such as ellipse fitting based on least squares method. The proposed method is verified experimentally, and the experimental results show that 35 scans can complete defect detection of large optics with size of 150 mm×120 mm×20 mm. The positioning accuracy of the defect depth for samples to be tested is smaller than 150 μm. It indicates that the method can detect the defects of large optics effectively. Furthermore, the error sources that influence experimental result and factors that limit the system resolution are analyzed. The results show that the system resolution can be effectively increased by increasing the lateral resolution of the imaging system or reducing the cross-section width of laser beam.

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杨菲菲, 缪洁, 谢雨江, 刘德安, 朱健强. 全内反射技术检测大口径光学元件体内缺陷[J]. 中国激光, 2017, 44(6): 0604005. Yang Feifei, Miao Jie, Xie Yujiang, Liu Dean, Zhu Jianqiang. Internal Defects of Large Optics Detected by Total Internal Reflection Technique[J]. Chinese Journal of Lasers, 2017, 44(6): 0604005.

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