强激光与粒子束, 2011, 23 (9): 2386, 网络出版: 2011-10-27
溅射功率对Mo薄膜微结构和性能的影响
Effects of sputtering power on structure and property of Mo films deposited by DC magnetron sputtering
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廖国, 何智兵, 陈太红, 许华, 李俊, 谌加军, 唐永建. 溅射功率对Mo薄膜微结构和性能的影响[J]. 强激光与粒子束, 2011, 23(9): 2386. Liao Guo, He Zhibing, Chen Taihong, Xu Hua, Li Jun, Chen Jiajun, Tang Yongjian. Effects of sputtering power on structure and property of Mo films deposited by DC magnetron sputtering[J]. High Power Laser and Particle Beams, 2011, 23(9): 2386.
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