光电子快报（英文版）, 2013, 9 (1): 34, Published Online: Oct. 12, 2017
A new method to characterize the metallic-oxide films for grayscale lithography
Basic Information
| DOI: | 10.1007/s11801-013-2351-9 |
| 中图分类号: | -- |
| 栏目: | |
| 项目基金: | This work has been supported by the National Natural Science Foundation of China (Nos.11004152 and 11204213), the Program of Tianjin Municipal Education Commission (No.20090715), and the Tianjin Natural Science Foundation (No.12JCQNJC00800). |
| 收稿日期: | Oct. 5, 2012 |
| 修改稿日期: | -- |
| 网络出版日期: | Oct. 12, 2017 |
| 通讯作者: | SUN Li-ping (lipingsunnk@163.com) |
| 备注: | -- |
SUN Li-ping, ZHANG Shuang-gen, WANG Zhe, DENG Jia-chun, Lü Jiang. A new method to characterize the metallic-oxide films for grayscale lithography[J]. 光电子快报（英文版）, 2013, 9(1): 34.
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