光电子快报(英文版), 2013, 9 (1): 34, Published Online: Oct. 12, 2017
A new method to characterize the metallic-oxide films for grayscale lithography
Metrics
摘要访问:1007次
PDF 下载:1次
全文浏览:1次
总被查询:0次
SUN Li-ping, ZHANG Shuang-gen, WANG Zhe, DENG Jia-chun, Lü Jiang. A new method to characterize the metallic-oxide films for grayscale lithography[J]. 光电子快报(英文版), 2013, 9(1): 34.