光子学报, 2019, 48 (1): 0131002, 网络出版: 2019-01-27
基于离子束溅射大口径光学元件平坦化层均匀性研究
Study on Planarization Layer Uniformity of Large-aperture Optical Elements Based on Ion Beam Sputtering
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冯时, 付秀华, 王大森, 李晓静, 聂凤明, 张旭. 基于离子束溅射大口径光学元件平坦化层均匀性研究[J]. 光子学报, 2019, 48(1): 0131002.
FENG Shi, FU Xiu-hua, WANG Da-sen, LI Xiao-jing, NIE Feng-ming, ZHANG Xu. Study on Planarization Layer Uniformity of Large-aperture Optical Elements Based on Ion Beam Sputtering[J]. ACTA PHOTONICA SINICA, 2019, 48(1): 0131002.
冯时, 付秀华, 王大森, 李晓静, 聂凤明, 张旭. 基于离子束溅射大口径光学元件平坦化层均匀性研究[J]. 光子学报, 2019, 48(1): 0131002. FENG Shi, FU Xiu-hua, WANG Da-sen, LI Xiao-jing, NIE Feng-ming, ZHANG Xu. Study on Planarization Layer Uniformity of Large-aperture Optical Elements Based on Ion Beam Sputtering[J]. ACTA PHOTONICA SINICA, 2019, 48(1): 0131002.
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