应用激光, 2019, 39 (2): 346, 网络出版: 2019-06-10   

飞秒激光在微加工领域的研究进展及其应用

Research Progress and Application of Femtosecond Laser in Microfabrication
作者单位
1 苏州大学应用技术学院,江苏 苏州215325
2 同济大学 航空航天与力学学院,上海 200092
摘要
近年来,为了使加工技术更加精准、无误差,各国研究者投入到了微加工领域的研究。而飞秒激光以其极高的峰值、较小的损伤阈值、高的聚焦力,使其成为国内外在微加工领域的热点研究对象。总结了近年来飞秒激光在微加工领域的研究进展,并从微加工金属材料、集成光学、生物医疗、纳米加工领域进行综述,最后指出飞秒激光发展到现在所存在的问题及对未来的期想。
Abstract
In recent years, researchers from various countries have invested in the field of micro-processing research in order to make the processing technology more accurate and error-free. Femtosecond laser has become a hot research topic at home and abroad with its extremely high peak intensity, small damage threshold and high focusing force. In this paper, the research progress of femtosecond laser in the field of microfabrication is reviewed and the research progress in the fields of microfabricated metal materials, integrated optics, biomedical and nano-fabrication is discussed in detail. Finally, the existing problems of femtosecond laser development are pointed out and the expectations for the future are put forward.
参考文献

[1] HE S T,YU J,HU M L.Femtosecond laser high precision fabrication for novel applications[J].Current Nanoscience,2016,12(6):676-684.

[2] PARK C K,XUE R P,LANNUTTI J J,et al.Ablation characteristics of electrospun core-shell nanofiber by femtosecond laser[J].Materials Science and Engineering:C,2016(65):232-239.

[3] LITTLE D J,AMS M,DEKKER P,et al.Femtosecond laser modification of fused silica: the effect of writing polarization on Si-O ring structure[J].Optics Express,2008,16(24): 20029-20037.

[4] MAHMOOD A S,VENKATAKRISHNAN K,TAN B.3-D aluminum nanostructure with microhole array synthesized by femtosecond laser radiation for enhanced light extinction[J].Nanoscale Research Letters,2013,8(1):477.

[5] PFEIFFER M,ENGEL A,WEIBMANTEL S,et al.Microstructuring of steel and hard metal using femtosecond laser pulses[J].Physics Procedia,2011(12):60-66.

[6] TAN Y X,CHU W,LIN J T,et al.Metal surface structuring with spatiotemporally focused femtosecond laser pulses[J].Journal of Optics,2017,20(1):1-19.

[7] ZHANG P,CHEN L,CHEN J X,et al.Material removal effect of microchannel processing by femtosecond laser[J].Optics and Lasers in Engineering,2017(98):69-75.

[8] 谭超,孙小燕,银恺,等.飞秒激光切割金属的表面粗糙度[J].中南大学学报:自然科学版,2015,469(12):4481-4487.

[9] ITO Y,SHINOMOTO R,NAGATO K,et al.Mechanisms of damage formation in glass in the process of femtosecond laser drilling[J].Applied Physics A,2018,124(2):181-189.

[10] GU C L,ZHANG D P,WANG D E,et al.Parallel femtosecond laser light sheet micro-manufacturing based on temporal focusing[J].Precision Engineering,2017(50):198-203.

[11] HO C Y,MA C,TSAI Y H.Thermal process of drilling for metal thin films using femtosecond laser[J].Applied Mechanics and Materials,2015(764-765):102-106.

[12] 张艳杰,宋海英,刘海云,等.飞秒激光成丝制备毫米级深孔[J].中国激光,2017,44(4):125-134.

[13] 胡梦宁,葛励成,张晋平,等.多脉冲飞秒激光深小孔的加工[J].中国激光,2016,43(4):94-100.

[14] 李志明,王玺,聂劲松.飞秒激光打孔硅的孔洞形貌研究[J].光子学报,2017,46(10):29-36.

[15] 谭险峰,杨俊华,耿艳青.脉冲宽度对激光打孔影响的试验研究[J].新技术新工艺,2011(3):77-79.

[16] QI Y,QI H X,CHEN A M,et al.Improvement of aluminum drilling efficiency and precision by shaped femtosecond laser[J].Applied Surface Science,2014(317):252-256.

[17] XU C C,JIANG L,LENG N,et al.Selective triggering of phase change in dielectric by femtosecond pulse trains based on electron dynamics control[J].Chinese Physics B,2013,22(4):334-337.

[18] YABLONOVITCH E.Inhibited spontaneous emission in solid-state physics and electronics[J].Physical Review Letters,1987,58(20):2059-2062.

[19] JOHN S.Strong localization of photonics in certain disordered dielectric super lattices [J].Physical Review Letters,1987(58):2486-2489.

[20] 陈诚,董志强,陈昊文,等.二维光子晶体[J].化学进展,2018,30(6):775-784.

[21] XIANG H L,JIANG Y J.Fiber bragg grating inscription in multi-core photonic crystal fiber by femtosecond laser[J].Optik,2018(171):9-14.

[22] SERBIN J,GU M.Experimental evidence for superprism effects in three-dimensional polymer photonic crystals[J].Advanced Materials,2006,18(2):224-228.

[23] HASKE W,CHEN V W,HALES J M,et al.65 nm feature sizes using visible wavelength 3-D multiphoton lithography[J].Optics Express,2007,15(6):3426-3436.

[24] 杨建菊,周桂耀,韩颖,等.基于光子晶体光纤和飞秒激光源的近红外波段宽带孤子和可见区高效色散波产生的实验[J].红外与毫米波学报,2016,35(4):477-482.

[25] 柴路,胡明列,方晓惠,等.光子晶体光纤飞秒激光技术研究进展[J].中国激光,2013,40(1):7-20.

[26] LIU S J,WU J W,LUO M Y,et al.Investigation of impact of photonic crystal fiber structure modified by femtosecond laser micromachining on long period gratings′ sensing characteristics[J].Optics and Lasers in Engineering,2016(77):79-84.

[27] HOANG V T,SIWICKI B,FRANCZYK M,et al.Broadband low-dispersion low-nonlinearity photonic crystal fiber dedicated to near-infrared high-power femtosecond pulse delivery[J].Optical Fiber Technology,2018(42):119-125.

[28] LV Z G,YANG Z,LI F,et al.High power all-polarization-maintaining photonic crystal fiber monolithic femtosecond nonlinear chirped-pulse amplifier[J].Optics Laser Technology,2018(100):282-285.

[29] LUAN F,GEORGE A K,HEDLEY T D,et al.All-solid photonic bandgap fiber[J].Optics Letters,2004,29(20):2369-2371.

[30] WEISE F,ACHAZI G,PAWLOWSKA M,et al.Systematic variation of parametrically shaped sub-pulse sequences after transmission through a photonic crystal fiber[J].Optics Communications,2011,284(15):3759-3771.

[31] LECAPLAIN C,RASOLONIANA L,EGOROVA O N,et al.Mode-locked all-solid photonic bandgap fiber laser[J].Applied Physics B,2012,107(2):317-322.

[32] ZHAO X W,CHAI LU,SHI J K,et al.Comparison of femtosecond pulse dynamics in a PCF amplifier with backward and forward pump schemes[J].Optik,2016,127(6):3435-3439.

[33] 饶云江,段德稳,杨晓辰,等.飞秒激光加工光子晶体光纤微型F-P传感器研究[J].光子学报,2009,38(1):91-93.

[34] 贾曰辰,陈峰.飞秒激光直写介电晶体光波导的研究进展[J].激光与光电子学进展,2016,53(1):7-22.

[35] CAI J W.Research on synchronization of double bald of femtosecond laser three-dimensional optical storage system[J].Optik,2016,127(1):456-460.

[36] 程光华,王屹山,刘青,等.用飞秒激光脉冲在PMMA内页面式写入三维光存储的研究[J].物理学报,2004,53(2):436-440.

[37] ZHANG F,DONG X R,YIN K,et al.Temperature effects on the geometry during the formation of micro-holes fabricated by femtosecond laser in PMMA[J].Optics & Laser Technology,2018(100):256-260.

[38] 杨栋,刘力谱,杨宏,等.激光微纳三维打印[J].激光与光电子学进展,2018,55(1):117-125.

[39] 卢立斌,王海鹏,管迎春,等.激光微加工技术制备生物医用器械的现状与进展[J].中国激光,2017,44(1):65-79.

[40] ARKHIPOV S N,SAYTASHEV I,DANTUS M.Intravital imaging study on photodamage produced by femtosecond near-infrared laser pulses in vivo[J].Photochemistry and Photobiology, 2016,92(2):308-313.

[41] BAEL S V,CHAI Y C,TRUSCELLO S,et al.The effect of pore geometry on the in vitro biological behavior of human periosteum-derived cells seeded on selective laser-melted Ti6Al4V bone scaffolds[J].Acta Biomaterialia,2012,8(7):2824-2834.

[42] ROTELLA G,ORAZI L,ALFANO M,et al.Innovative high-speed femtosecond laser nano-patterning for improved adhesive bonding of Ti6Al4V titanium alloy[J].CIRP Journal of Manufacturing Science and Technology,2017(18):101-106.

[43] 狄建科,周明,杨海峰,等.飞秒激光双光子制造生物微器件微支架[J].中国激光,2009,36(1):249-254.

[44] 位迪,程萍,陈向东,等.基于飞秒激光加工非金属血管支架的工艺研究[J].激光与光电子学进展,2013,50(9):121-126.

[45] ALARFAJ K M,HANTERA M M.Comparison of LASEK, mechanical microkeratome LASIK and femtosecond LASIK in low and moderate myopia[J].Saudi Journal of Ophthalmology,2014,28(3):214-219.

[46] 吴克雄,黄国富.飞秒激光LASIK手术后角膜生物力学变化的研究进展[J].临床合理用药杂志,2015,8(31):180-181.

[47] 聂新钢,黄琰霞,何颖颖,等.飞秒激光LASIK术后角膜生物力学的改变[J].国际眼科杂志,2018,18(2):390-392.

[48] VICKERS L A,GUPTA P K.Femtosecond laser-assisted keratotomy[J].Current Opinion in Ophthalmology,2016,27(4):277-284.

[49] PASZTOR D,KOLOZSVARI B L,LOSONCZY G,et al.Femtosecond laser-assisted keratoplasty combined with cataract extraction in a patient with keratoconus and oculocutaneous albinism[J].Indian Journal of Ophthalmology,2016,64(3):246-248.

[50] 王东.基于DNA损伤修复的分子靶向治疗:肿瘤靶向治疗的新篇章[J].第三军医大学学报,2014,36(22):2243-2248.

[51] KARKI S,SHI F J,ARCHER J J,et al.Direct analysis of proteins from solutions with high salt concentration using laser electrospray mass spectrometry[J].Journal of the American Society for Mass Spectrometry,2018,29(5):1002-1011.

[52] 彭娜娜,霍燕燕,周侃,等.飞秒激光诱导自组织纳米周期结构及其光学特性的研究进展[J].物理学报,2013,62(9):9-16.

[53] FERNANDEZ-BRAVO A,SIVAKUMAR P,MELIKECHI N,et al.Femtosecond laser ablation synthesis of aryl functional group substituted gold nanoparticles[J].Journal of Nanoscience and Nanotechnology,2017,17(4):2852-2856.

[54] UWADA T,WANG S F,LIU T H,et al.Preparation and micropatterning of gold nanoparticles by femtosecond laser-induced optical breakdown[J].Journal of Photochemistry and Photobiology A:Chemistry,2017(346):177-186.

[55] CHEN Y H,YEH C S.Laser ablation method: use of surfactants to form the dispersed Ag nanoparticles[J].Colloids and Surfaces A:Physicochemical and Engineering Aspects,2002,197(1-3):133-139.

[56] 方合,王顺利,李立群,等.液相激光烧蚀合成ZnO及Zn/ZnO纳米颗粒及其光致发光性能[J].物理学报,2011,60(9):487-492.

[57] CHEFONOV O V,OVCHINNIKOV A V,IL′INA I V,et al.Measurement of ablation threshold of oxide-film-coated aluminium nanoparticles irradiated by femtosecond laser pulses[J].Quantum Electronics,2016,46(3):223-228.

[58] 余佳,何书通,宋寰宇,等.飞秒激光前向转移诱导产生金属纳米结构薄膜[J].中国激光,2017,44(1):97-102.

[59] 高胜淼,韩培高,闫珂柱.飞秒激光对硅表面微构造的研究进展[J].激光与光电子学进展,2013,50(11):16-22.

[60] ZHAN X P,XU H L,LI C H,et al.Remote and rapid micromachining of broadband low-reflectivity black silicon surfaces by femtosecond laser filaments[J].Optics Letters,2017, 42(3):510-513.

[61] 彭滟,温雅,张冬生,等.飞秒激光功率与脉冲数的比例关系对制备硅表面微结构的影响[J].中国激光,2011,38(12):83-87.

[62] 林喆,叶晓慧,韩金鹏,等.基于飞秒激光切割的石墨烯图案化研究[J].中国激光,2015,42(7):93-97.

杨涵, 于希辰, 吴一帆, 刘海青, 李东亚. 飞秒激光在微加工领域的研究进展及其应用[J]. 应用激光, 2019, 39(2): 346. Yang Han, Yu Xichen, Wu Yifan, Liu Haiqing, Li Dongya. Research Progress and Application of Femtosecond Laser in Microfabrication[J]. APPLIED LASER, 2019, 39(2): 346.

本文已被 3 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!