光学学报, 2015, 35 (1): 0122005, 网络出版: 2014-12-15
基于混合梯度下降的高性能光刻机离轴照明衍射光学元件设计 下载: 611次
A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System
补充材料
宋强, 朱菁, 王健, 张方, 吕向博, 杨宝喜, 黄惠杰. 基于混合梯度下降的高性能光刻机离轴照明衍射光学元件设计[J]. 光学学报, 2015, 35(1): 0122005. Song Qiang, Zhu Jing, Wang Jian, Zhang Fang, Lü Xiangbo, Yang Baoxi, Huang Huijie. A Mixed Gradient Algorithm for High Performance DOE Design in Off-Axis Lithography Illumination System[J]. Acta Optica Sinica, 2015, 35(1): 0122005.