光学 精密工程, 2010, 18 (11): 2454, 网络出版: 2010-12-13  

单晶硅振动环陀螺仪的制作

Fabrication of single-crystal silicon vibrating ring gyroscope
作者单位
中国科学院 电子学研究所 传感技术国家重点实验室北方基地,北京 100190
引用该论文

张明, 陈德勇, 王军波. 单晶硅振动环陀螺仪的制作[J]. 光学 精密工程, 2010, 18(11): 2454.

ZHANG Ming, CHEN De-yong, WANG Jun-bo. Fabrication of single-crystal silicon vibrating ring gyroscope[J]. Optics and Precision Engineering, 2010, 18(11): 2454.

参考文献

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    CHEN L, CHEN D Y, WANG J B, et al.. High performance electromagnetic micro-machined ring vibration gyroscope [J]. Opt. Precision Eng., 2009,17(8):1916-1921.(in Chinese)

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张明, 陈德勇, 王军波. 单晶硅振动环陀螺仪的制作[J]. 光学 精密工程, 2010, 18(11): 2454. ZHANG Ming, CHEN De-yong, WANG Jun-bo. Fabrication of single-crystal silicon vibrating ring gyroscope[J]. Optics and Precision Engineering, 2010, 18(11): 2454.

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