基于振镜扫描方式的光学元件表面损伤检测 下载: 552次
郭亚晶, 唐顺兴, 姜秀青, 朱宝强, 林尊琪. 基于振镜扫描方式的光学元件表面损伤检测[J]. 光学学报, 2017, 37(6): 0612003.
Guo Yajing, Tang Shunxing, Jiang Xiuqing, Zhu Baoqiang, Lin Zunqi. Damage Inspection of Optical Surface Based on Galvanometer Scanning[J]. Acta Optica Sinica, 2017, 37(6): 0612003.
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郭亚晶, 唐顺兴, 姜秀青, 朱宝强, 林尊琪. 基于振镜扫描方式的光学元件表面损伤检测[J]. 光学学报, 2017, 37(6): 0612003. Guo Yajing, Tang Shunxing, Jiang Xiuqing, Zhu Baoqiang, Lin Zunqi. Damage Inspection of Optical Surface Based on Galvanometer Scanning[J]. Acta Optica Sinica, 2017, 37(6): 0612003.