基于交替相移掩模矢量空间像的偏振像差检测方法
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沈丽娜, 王向朝, 李思坤, 闫观勇, 诸波尔, 孟泽江, 张恒. 基于交替相移掩模矢量空间像的偏振像差检测方法[J]. 光学学报, 2016, 36(8): 0811003. Shen Lina, Wang Xiangzhao, Li Sikun, Yan Guanyong, Zhu Boer, Meng Zejiang, Zhang Heng. Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask[J]. Acta Optica Sinica, 2016, 36(8): 0811003.
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