光学学报, 1993, 13 (8): 711, 网络出版: 2007-12-07
多孔径扫描波面恢复技术的精度评定及影响因素
Factors Having influence on the accuracy of multi-aperture overlap-scanning technique (MAOST) and Analysis
摘要
多孔径扫描波面恢复技术是一项新的高精度大孔径面形检测手段.本文从建立波面恢复精度的评价标准出发,结合实测结果进行讨论,并对影响精度的两个重要因素即拼接模式及拼接区大小进行分析.
Abstract
Multi - aperture overlap - scanning technique (MAOST) is a effective meansof measuring large aperture wavefront of high precision. Having giventhe accuracy definition of MAOST, this paper discusses, withexperimental tests, two main influential factors, i. e. , the apertureconnection mode and overlap coefficient.
参考文献
程维明, 林有略, 陈明仪. 多孔径扫描波面恢复技术的精度评定及影响因素[J]. 光学学报, 1993, 13(8): 711. 程维明, 林有略, 陈明仪. Factors Having influence on the accuracy of multi-aperture overlap-scanning technique (MAOST) and Analysis[J]. Acta Optica Sinica, 1993, 13(8): 711.
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