激光技术, 2018, 42 (4): 567, 网络出版: 2018-08-29
激光等离子体对硅表面微纳粒子除去机理研究
Study on removal mechanism of micro-/nano-particles on silicon surface by laser plasma
图 & 表
罗锦锋, 宋世军, 王平秋, 刘全喜. 激光等离子体对硅表面微纳粒子除去机理研究[J]. 激光技术, 2018, 42(4): 567. LUO Jinfeng, SONG Shijun, WANG Pingqiu, LIU Quanxi. Study on removal mechanism of micro-/nano-particles on silicon surface by laser plasma[J]. Laser Technology, 2018, 42(4): 567.