发光学报, 2015, 36 (9): 1094, 网络出版: 2015-10-22   

极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析

Analysis for Groove Density and Spectral Resolution of Varied-line-space Gratings in EUV Spectrum
作者单位
中国科学院 长春光学精密机械与物理研究所, 吉林 长春130033
引用该论文

李文昊, 姜岩秀, 吴娜, 张桐, 王鹍. 极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析[J]. 发光学报, 2015, 36(9): 1094.

LI Wen-hao, JIANG Yan-xiu, WU Na, ZHANG Tong, WANG Kun. Analysis for Groove Density and Spectral Resolution of Varied-line-space Gratings in EUV Spectrum[J]. Chinese Journal of Luminescence, 2015, 36(9): 1094.

参考文献

[1] Duke P H. Synchrotron Radiation [M]. Oxford: Oxford University Press, 2000.

[2] Ma D L. Introduction to Synchrotron Radiation Applications [M]. Shanghai: Fudan University Press, 2001 (in Chinese).

[3] Tong Y J. Study of Precision Measurements of Monk-Gillieson Soft X-ray Grating Monochromator and Offner Inaging Spectrometer [D]. Shanghai: Shanghai Institute of Applied Physics, Chinese Academy of Science, 2010 (in Chinese).

[4] Hofmann A. The Physics of Synchrotron Radiation [M]. Cambridge: Cambridge University Press, 2004.

[5] Li C Y. Variable-line-spacing Grating Monochromators Design and Key Techniques [D]. Hefei: University of Science and Technology of China, 2014 (in Chinese).

[6] Francis P, Lagarde B, Idir M. A high resolution soft X-ray monochromator focused by the holographic effect of a VLS grating [J]. AIP Conf. Proc., 2006, 879:655-658.

[7] Liu Z K, Liu Y, Qiu K Q, et al. Design and fabrication of soft X-ray double frequency grating [J]. Opt. Precision Eng.(光学 精密工程), 2013, 21(7):1780-1785 (in Chinese).

[8] Li C Y, Zhu J F, Wang Q P. Design of a varied-line-spacing plane grating monochromator at NSRL for surface physics [J]. J. Phys.: Conf. Ser., 2015, 45(16):162008-1-6.

[9] Namioka T, Koike M. Aspheric wave-front recording optics for holographic gratings [J]. Appl. Opt., 1995, 34(13):2180-2186.

[10] Jiang Y X, Han J, Li W H, et al. Characteristic analysis for different beamsplitters of the plane holographic grating lithography system [J]. Chin. Opt. (中国光学), 2015, 8(2):241-247 (in Chinese)

[11] Koike M, Yamazaki T, Harada Y. Design of holographic gratings recorded with aspheric wave-front recording optics for soft X-ray flat-field spectrographs [J]. J. Electron Spectros. Related Phenom., 1999, 101:913-918.

[12] Ling Q, Wu G, Liu B, et al. Varied line spacing plane holographic grating recorded by using uniform line spacing plane gratings [J]. Appl. Opt., 2005, 45(21):5059-5065.

[13] Jiang Y X, Bayanheshig, Yang S, et al. Design of a varied-line-space plane grating in EUV spectrum [J]. Acta Optica Sinica (光学学报), 2015, 36(1):45-55 (in Chinese).

[14] Namioka T. Theory of the concave grating Ⅱ. Application of the theory to the off-plane eagle mounting in a vacuum spectrograph [J]. J. Opt. Soc. Am., 1959, 49(5):460-465.

[15] Du X W. Measurement of Groove Density 2D Distribution of Concave VLS Grating and Construction of A Soft X-ray Flat Field Spectrograph [D]. Hefei: University of Science and Technology of China, 2013 (in Chinese).

李文昊, 姜岩秀, 吴娜, 张桐, 王鹍. 极紫外波段变栅距光栅刻槽密度变化及光谱分辨能力分析[J]. 发光学报, 2015, 36(9): 1094. LI Wen-hao, JIANG Yan-xiu, WU Na, ZHANG Tong, WANG Kun. Analysis for Groove Density and Spectral Resolution of Varied-line-space Gratings in EUV Spectrum[J]. Chinese Journal of Luminescence, 2015, 36(9): 1094.

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