强激光与粒子束, 2008, 20 (1): 0067, 网络出版: 2010-05-27   

高反射率Mo/B4C多层膜设计及制备

Design and fabrication of high reflectivity Mo/B4C multilayer mirrors
作者单位
同济大学 精密光学工程技术研究所 物理系,上海 200092
引用该论文

张慧晶, 张众, 朱京涛, 白亮, 陈锐, 黄秋实, 刘丽琴, 谭默言, 王风丽, 王占山, 陈玲燕. 高反射率Mo/B4C多层膜设计及制备[J]. 强激光与粒子束, 2008, 20(1): 0067.

ZHANG Hui-jing, ZHANG Zhong, ZHU Jing-tao, BAI Liang, CHEN Rui, HUANG Qiu-shi, LIU Li-qin, TAN Mo-yan, WANG Feng-li, WANG Zhan-shan, CHEN Ling-yan. Design and fabrication of high reflectivity Mo/B4C multilayer mirrors[J]. High Power Laser and Particle Beams, 2008, 20(1): 0067.

参考文献

[1] Brown C M,Feldman U,Seely J F,et al. Imaging of laser-produced plasmas at 44 A using a multilayer mirror[J]. Opt Commun,1988,68: 190-195.

[2] Nemechek J J. Microelectronics industry optimizes operations with ultraviolet optics[J]. Laser Focus World,1995,31(4): 113-118.

[3] Masahito N,Hajime N,Yosohiro S. Stress changes and stability of sputter-deposited Mo/B4C multilayer films for extreme ultraviolet mirrors[J]. JpnJ Appl Phys,2002,41: 3069-3075.

[4] Stearns D G,Rosen R S. Normal-incidence X-ray mirror for 7 nm[J]. Opt Lett,1991,16(16): 1283-1285.

[5] 吕俊霞,马月英,张俊平,等.正人射Mo/B4C软X射线多层膜[J].光学学报,1998,18(1):109-111.

    Lü J X,Ma Y Y,Zhang J P,et al. Normal-incidence Mo/B4C Soft X-ray multilayer. Acta Optica Sinica,1998,18(1): 109-111

[6] Yamamoto M,Namioka T. Layer-by-layer design method for soft-X-ray multilayers[J]. Appl Opt,1992,31(10): 1622-1630.

[7] Slaughter J M,Kearney P A,Falco C M. Characterization of Pd-B,Ag-B and Si-B Interfaces[C]//Proc of SPIE. 1991,1547:71-79.

[8] Windt D L,Donguy S,Seely J,et al. EUV multilayers for solar physics[C]//Proc of SPIE. 2004,5168: 1-11.

[9] Jankowski A F,Perry P L. Characterization of Mo/B4C multilayers[J]. Thin Solid Films,1991,206(1-2): 365-368.

[10] Jankowski A F,Schrawyer L R,Wall M A,et al. Interfacial bonding in W/C and W/B4C multilayers[J]. J Vac Sci Technol A,1989,7(4) : 2914-2918.

[11] 吕俊霞,马月英,裴舒,等.Mo/B4C软X射线多层膜结构特性研究[J].光子学报,2000,29(5):459-461.

    Lü J X,Ma Y Y,Pei S,et al. Structural characteristic of Mo/B4C soft X-ray multilayer mirrors. Acta Photonica Sinica,2000,29(5): 459-461

[12] http://www.henke.lbl.gov/optical_constants/getdb2.html[OL].2007-08-06.

[13] 范瑞瑛,范正修.薄膜应力分析及一些测量结果[J].2010-5-24.

    Fan R Y,Fan Z X. Stress analysis of thin films and some testing results. Optical Instruments,2001,23(5/6): 84-91

张慧晶, 张众, 朱京涛, 白亮, 陈锐, 黄秋实, 刘丽琴, 谭默言, 王风丽, 王占山, 陈玲燕. 高反射率Mo/B4C多层膜设计及制备[J]. 强激光与粒子束, 2008, 20(1): 0067. ZHANG Hui-jing, ZHANG Zhong, ZHU Jing-tao, BAI Liang, CHEN Rui, HUANG Qiu-shi, LIU Li-qin, TAN Mo-yan, WANG Feng-li, WANG Zhan-shan, CHEN Ling-yan. Design and fabrication of high reflectivity Mo/B4C multilayer mirrors[J]. High Power Laser and Particle Beams, 2008, 20(1): 0067.

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