光电工程, 2019, 46 (12): 180507, 网络出版: 2020-01-09   

光谱椭偏系统光源和光谱仪偏振相关系数测量

Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry
范真涛 1,2,3汤媛媛 1,2,*魏凯 1,2陈颖 4张雨东 1,2
作者单位
1 中国科学院自适应光学重点实验室,四川 成都 610209
2 中国科学院光电技术研究所,四川 成都 610209
3 中国科学院大学,北京 100049
4 中国人民解放军61046部队,北京 100000
引用该论文

范真涛, 汤媛媛, 魏凯, 陈颖, 张雨东. 光谱椭偏系统光源和光谱仪偏振相关系数测量[J]. 光电工程, 2019, 46(12): 180507.

Fan Zhentao, Tang Yuanyuan, Wei Kai, Chen Ying, Zhang Yudong. Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry[J]. Opto-Electronic Engineering, 2019, 46(12): 180507.

参考文献

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范真涛, 汤媛媛, 魏凯, 陈颖, 张雨东. 光谱椭偏系统光源和光谱仪偏振相关系数测量[J]. 光电工程, 2019, 46(12): 180507. Fan Zhentao, Tang Yuanyuan, Wei Kai, Chen Ying, Zhang Yudong. Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry[J]. Opto-Electronic Engineering, 2019, 46(12): 180507.

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