光电工程, 2019, 46 (12): 180507, 网络出版: 2020-01-09
光谱椭偏系统光源和光谱仪偏振相关系数测量
Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry
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范真涛, 汤媛媛, 魏凯, 陈颖, 张雨东. 光谱椭偏系统光源和光谱仪偏振相关系数测量[J]. 光电工程, 2019, 46(12): 180507. Fan Zhentao, Tang Yuanyuan, Wei Kai, Chen Ying, Zhang Yudong. Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry[J]. Opto-Electronic Engineering, 2019, 46(12): 180507.