[1] 杨 东, 毛 耀, 丁 科, 等. 模型参考算法在快速反射镜中的应用［J］. 红外与激光工程, 2013, 42(10): 2790-2795.

    Yang Dong, Mao Yao, Ding Ke, et al. Application of model reference adaptive algorithm in the fast steering-mirrors［J］. Infrared and Laser Engineering, 2013, 42(10): 2790-2795.

[2] Chen W, Chen S H, Luo D, et al. A compact two-dimensional laser scanner based on piezoelectric actuators［J］. Review of Scientific Instruments, 2015, 86(1): 013102.

[3] Liu L, Zhao Y B, Tang L, et al. Modeling and identification investigation of multi-field hysteretic dynamics in flexure-guided piezo platform［J］. Mechanical Systems and Signal Processing, 2015, 50-51: 594-606.

[4] 王 耿, 樊 磊, 周 虹. 压电倾斜镜精密跟踪控制技术研究现状与发展［J］. 压电与声光, 2016, 38(1): 5-10.

    Wang Geng, Fan Lei, Zhou Hong. Current status and future development of precision tracking control technology of piezoelectric fast steering mirror［J］. Piezoelectrics and Acoustooptics, 2016, 38(1): 5-10.

[5] 孙立宁, 孙绍云, 曲东升, 等. 基于PZT的微驱动定位系统及控制方法的研究［J］. 光学 精密工程, 2004, 12(1): 55-59.

    Sun Lining, Sun Shaoyun, Qu Dongsheng, et al. Micro-drive positioning systems based on PZT and its control［J］. Optics and Precision Engineering, 2004, 12(1): 55-59.

[6] 田延岭, 张大卫, 闫 兵. 二自由度微定位平台的研制［J］. 光学 精密工程, 2006, 14(1): 94-99.

    Tian Yanling, Zhang Dawei, Yan Bing. Development of a 2-DOF micropositioning table［J］. Optics and Precision Engineering, 2006, 14(1): 94-99.

[7] 范 伟, 余晓芬, 奚 琳. 压电陶瓷驱动系统及控制方法研究［J］. 光学 精密工程, 2007, 15(3): 368-371.

    Fan Wei, Yu Xiaofen, Xi Lin. Research on driving system and controlling means of PZT［J］. Optics and Precision Engineering, 2007, 15(3): 368-371.

[8] 杨志刚, 刘登云, 吴丽萍, 等. 应用于压电叠堆泵的微位移放大机构［J］. 光学 精密工程, 2007, 15(6): 884-888.

    Yang Zhigang, Liu Dengyun, Wu Liping, et al. Micro-displacement magnifying mechanism used in piezo-stack pump［J］. Optics and Precision Engineering, 2007, 15(6): 884-888.

[9] Liu L, Tan K K, Chen S L, et al. Discrete composite control of piezoelectric actuators for high-speed and precision scanning. IEEE Transactions on Industrial Informatics, 2013, 9(2): 859-868.

[10] Park J H, Lee H S, Lee J H, et al. Design of a piezoelectric-driven tilt mirror for a fast laser scanner［J］. Japanese Journal of Applied Physics, 2012, 51: 09MD14.

[11] 王 耿, 官春林, 张小军, 等. 应变式微型精密压电驱动器的一体化设计及其PID控制［J］. 光学 精密工程, 2013, 21(3): 709-716.

    Wang Geng, Guan Chunlin, Zhang Xiaojun, et al. Design and control of miniature piezoelectric actuator based on strain gauge sensor［J］. Optics and Precision Engineering, 2013, 21(3): 709-716.

[12] 周 睿, 李新阳, 沈 锋, 等. 基于两级高速倾斜镜闭环控制的光束稳定技术研究［J］. 光学学报, 2016, 36(12): 1214002.

    Zhou Rui, Li Xinyang, Shen Feng, et al. Laser beam stabilizing system based on close loop control of two fast steering mirrors in series［J］. Acta Optica Sinica, 2016, 36(12): 1214002.

[13] 向思桦, 陈四海, 吴 鑫, 等. 一种基于压电驱动器的新型高速激光扫描器的研制和测试［J］. 中国激光, 2010, 37(2): 408-413.

    Xiang Sihua, Chen Sihai, Wu Xin, et al. Study and test on a novel fast laser scanner based on piezo-actuators［J］. Chinese J Lasers, 2010, 37(2): 408-413.

[14] 李超宏, 鲜 浩, 姜文汉, 等. 用于白天自适应光学的视场偏移哈特曼波前传感器［J］. 激光与光电子学进展, 2007, 44(2): 22.

    Li Chaohong, Xian Hao, Jiang Wenhan, et al. Field-of-view shifted shack-hartmann wavefront sensor for daytime adaptive optics［J］. Laser & Optoelectronics Progress, 2007, 44(2): 22.

[15] 张 昊, 闫 锋, 魏海松, 等. 扫描哈特曼波前检测技术的误差分析研究［J］. 激光与光电子学进展, 2016, 53(11): 111203.

    Zhang Hao, Yan Feng, Wei Haisong, et al. Error analysis of scanning Hartmann wavefront testing technique［J］. Laser & Optoelectronics Progress, 2016, 53(11): 111203.

[16] 范 伟, 余晓芬. 压电陶瓷驱动器蠕变特性的研究［J］. 仪器仪表学报, 2006, 27(11): 1383-1386.

    Fan Wei, Yu Xiaofen. Study on PZT actuator creep characteristics［J］. Chinese Journal of Scientific Instrument, 2006, 27(11): 1383-1386.

[17] 赵学良, 张承进, 顾建军, 等. 离散化正弦电压作用下的压电驱动器蠕变特性［J］. 光学 精密工程, 2014, 22(4): 942-948.

    Zhao Xueliang, Zhang Chenjin, Gu Jianjun, et al. Creep characteristics of stack piezoactuator effected by discretized sine voltage［J］. Optics and Precision Engineering, 2014, 22(4): 942-948.

[18] 王冲冲, 胡立发, 何 斌, 等. 基于神经网络的压电倾斜镜磁滞补偿方法研究［J］. 中国激光, 2013, 40(11): 1113001.

    Wang Chongchong, Hu Lifa, He Bin, et al. Hysteresis compensation method of piezoelectric steering mirror based on neural network［J］. Chinese J Lasers, 2013, 40(11): 1113001.

[19] Wang G, Chen G Q, Zhou H, et al. Modeling and tracking control for piezoelectric actuator based on a new asymmetric hysteresis model［J］. IEEE/CAA Journal of Automatica Sinica, 2016, 3(99): 1-10.