应变式压电光学偏转器的集成设计及性能测试

提出了一种应变反馈式压电驱动光学偏转器。首先介绍压电光学偏转器的机械结构及内部组成原理, 光学偏转器内部集成两个应变反馈式压电驱动器, 来实现对镜面的驱动及其角位移测量。然后自准直仪用于校准偏转器, 获得的偏转精度为0.05′, 并进行一系列开闭环实验以验证定位和跟踪性能。实验结果表明：在开环模式下, 30 min的定位时间内出现12.60%的蠕变, 对变幅值三角波的偏转跟踪误差占偏转量程的13.70%；在闭环模式下, 蠕变基本得到消除, 对变幅值三角波的偏转跟踪误差占偏转量程的4.31%。因此所设计的压电光学偏转器结构合理, 性能稳定, 具有较好的工程应用价值。

Abstract

A kind of strain feedback type piezoelectric optical deflector is presented. The mechanical structure and internal composition principle are firstly introduced for the optical deflector. Two strain feedback type piezoelectric actuators are integrated within the optical deflector, which is used to actuate the mirror and measure its angle displacement. An autocollimator is used to calibrate the deflector, and the obtained deflection accuracy is 0.05′. And then a series of tests are conducted to validate the positioning and tracking performances for both open and closed loop operations. Experimental results show that, the value of creep reaches 12.60% within 30 min and the tracking error for the varied-amplitude triangular-wave reaches 13.70% of the full scale in open loop mode. In closed loop mode, the creep effect is basically eliminated and the tracking error reaches 4.31% of the full scale. The designed piezoelectric optical deflector has good engineering application value for its reasonable structure and stable performance.

参考文献

[1] 杨东, 毛耀, 丁科, 等. 模型参考算法在快速反射镜中的应用［J］. 红外与激光工程, 2013, 42(10): 2790-2795.

Yang Dong, Mao Yao, Ding Ke, et al. Application of model reference adaptive algorithm in the fast steering-mirrors［J］. Infrared and Laser Engineering, 2013, 42(10): 2790-2795.

[2] Chen W, Chen S H, Luo D, et al. A compact two-dimensional laser scanner based on piezoelectric actuators［J］. Review of Scientific Instruments, 2015, 86(1): 013102.

[3] Liu L, Zhao Y B, Tang L, et al. Modeling and identification investigation of multi-field hysteretic dynamics in flexure-guided piezo platform［J］. Mechanical Systems and Signal Processing, 2015, 50-51: 594-606.

[4] 王耿, 樊磊, 周虹. 压电倾斜镜精密跟踪控制技术研究现状与发展［J］. 压电与声光, 2016, 38(1): 5-10.

Wang Geng, Fan Lei, Zhou Hong. Current status and future development of precision tracking control technology of piezoelectric fast steering mirror［J］. Piezoelectrics and Acoustooptics, 2016, 38(1): 5-10.

[5] 孙立宁, 孙绍云, 曲东升, 等. 基于PZT的微驱动定位系统及控制方法的研究［J］. 光学精密工程, 2004, 12(1): 55-59.

Sun Lining, Sun Shaoyun, Qu Dongsheng, et al. Micro-drive positioning systems based on PZT and its control［J］. Optics and Precision Engineering, 2004, 12(1): 55-59.

[6] 田延岭, 张大卫, 闫兵. 二自由度微定位平台的研制［J］. 光学精密工程, 2006, 14(1): 94-99.

Tian Yanling, Zhang Dawei, Yan Bing. Development of a 2-DOF micropositioning table［J］. Optics and Precision Engineering, 2006, 14(1): 94-99.

[7] 范伟, 余晓芬, 奚琳. 压电陶瓷驱动系统及控制方法研究［J］. 光学精密工程, 2007, 15(3): 368-371.

Fan Wei, Yu Xiaofen, Xi Lin. Research on driving system and controlling means of PZT［J］. Optics and Precision Engineering, 2007, 15(3): 368-371.

[8] 杨志刚, 刘登云, 吴丽萍, 等. 应用于压电叠堆泵的微位移放大机构［J］. 光学精密工程, 2007, 15(6): 884-888.

Yang Zhigang, Liu Dengyun, Wu Liping, et al. Micro-displacement magnifying mechanism used in piezo-stack pump［J］. Optics and Precision Engineering, 2007, 15(6): 884-888.

[9] Liu L, Tan K K, Chen S L, et al. Discrete composite control of piezoelectric actuators for high-speed and precision scanning. IEEE Transactions on Industrial Informatics, 2013, 9(2): 859-868.

[10] Park J H, Lee H S, Lee J H, et al. Design of a piezoelectric-driven tilt mirror for a fast laser scanner［J］. Japanese Journal of Applied Physics, 2012, 51: 09MD14.

[11] 王耿, 官春林, 张小军, 等. 应变式微型精密压电驱动器的一体化设计及其PID控制［J］. 光学精密工程, 2013, 21(3): 709-716.

Wang Geng, Guan Chunlin, Zhang Xiaojun, et al. Design and control of miniature piezoelectric actuator based on strain gauge sensor［J］. Optics and Precision Engineering, 2013, 21(3): 709-716.

[12] 周睿, 李新阳, 沈锋, 等. 基于两级高速倾斜镜闭环控制的光束稳定技术研究［J］. 光学学报, 2016, 36(12): 1214002.

Zhou Rui, Li Xinyang, Shen Feng, et al. Laser beam stabilizing system based on close loop control of two fast steering mirrors in series［J］. Acta Optica Sinica, 2016, 36(12): 1214002.

[13] 向思桦, 陈四海, 吴鑫, 等. 一种基于压电驱动器的新型高速激光扫描器的研制和测试［J］. 中国激光, 2010, 37(2): 408-413.

Xiang Sihua, Chen Sihai, Wu Xin, et al. Study and test on a novel fast laser scanner based on piezo-actuators［J］. Chinese J Lasers, 2010, 37(2): 408-413.

[14] 李超宏, 鲜浩, 姜文汉, 等. 用于白天自适应光学的视场偏移哈特曼波前传感器［J］. 激光与光电子学进展, 2007, 44(2): 22.

Li Chaohong, Xian Hao, Jiang Wenhan, et al. Field-of-view shifted shack-hartmann wavefront sensor for daytime adaptive optics［J］. Laser & Optoelectronics Progress, 2007, 44(2): 22.

[15] 张昊, 闫锋, 魏海松, 等. 扫描哈特曼波前检测技术的误差分析研究［J］. 激光与光电子学进展, 2016, 53(11): 111203.

Zhang Hao, Yan Feng, Wei Haisong, et al. Error analysis of scanning Hartmann wavefront testing technique［J］. Laser & Optoelectronics Progress, 2016, 53(11): 111203.

[16] 范伟, 余晓芬. 压电陶瓷驱动器蠕变特性的研究［J］. 仪器仪表学报, 2006, 27(11): 1383-1386.

Fan Wei, Yu Xiaofen. Study on PZT actuator creep characteristics［J］. Chinese Journal of Scientific Instrument, 2006, 27(11): 1383-1386.

[17] 赵学良, 张承进, 顾建军, 等. 离散化正弦电压作用下的压电驱动器蠕变特性［J］. 光学精密工程, 2014, 22(4): 942-948.

Zhao Xueliang, Zhang Chenjin, Gu Jianjun, et al. Creep characteristics of stack piezoactuator effected by discretized sine voltage［J］. Optics and Precision Engineering, 2014, 22(4): 942-948.

[18] 王冲冲, 胡立发, 何斌, 等. 基于神经网络的压电倾斜镜磁滞补偿方法研究［J］. 中国激光, 2013, 40(11): 1113001.

Wang Chongchong, Hu Lifa, He Bin, et al. Hysteresis compensation method of piezoelectric steering mirror based on neural network［J］. Chinese J Lasers, 2013, 40(11): 1113001.

[19] Wang G, Chen G Q, Zhou H, et al. Modeling and tracking control for piezoelectric actuator based on a new asymmetric hysteresis model［J］. IEEE/CAA Journal of Automatica Sinica, 2016, 3(99): 1-10.

王耿, 周克辛, 周虹. 应变式压电光学偏转器的集成设计及性能测试[J]. 激光与光电子学进展, 2017, 54(8): 082301. Wang Geng, Zhou Kexin, Zhou Hong. Integrated Design and Performance Test for Strain Type Piezoelectric Optical Deflector[J]. Laser & Optoelectronics Progress, 2017, 54(8): 082301.

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