激光技术, 2009, 33 (1): 100, 网络出版: 2010-01-22
基于光纤信号传输的准分子激光器控制系统
Development of controller for excimer laser based on optical fiber
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史萌萌, 江海河, 邓国庆, 贺龙海. 基于光纤信号传输的准分子激光器控制系统[J]. 激光技术, 2009, 33(1): 100. SHI Meng-meng, JIANG Hai-he, DENG Guo-qing, HE Long-hai. Development of controller for excimer laser based on optical fiber[J]. Laser Technology, 2009, 33(1): 100.
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