以铌箔为基底，用阳极氧化法结合氨气还原氮化法制备出氮化铌纳米管，利用X射线衍射仪(XRD)、X射线光电子能谱(XPS)和扫描电镜(SEM)等结构表征手段和循环伏安法(CV)、充放电(GCD)和交流阻抗法(EIS)等电化学测试手段研究了还原氮化温度对纳米管的物相、形貌以及电化学性能的影响。结果表明，还原氮化后出现了氮化铌物相，以氧氮化铌固溶体形式存在，当还原氮化温度为700 ℃时，氮化铌纳米管阵列结构均匀，纳米管的孔内径约为35 nm，管壁厚度约为12 nm，纳米管长度约为1.5 μm，样品中内在阻抗和电荷转移电阻较小，在电流密度为0.1 mA/cm2时，其比电容为400 μF/cm2。

The niobium nitride nanotubes were prepared on niobium foil by anodic oxidation combined with ammonia reduction nitridation. The effect of reduction nitriding temperature on the phase, morphology and electrochemical properties of the nanotubes were investigated by XRD, XPS, SEM and electrochemical measurements such as CV, GCD and EIS. The results show that niobium nitride phase in the form of niobium oxide nitride appears after reduction nitriding. When the reduction nitriding temperature is 700 ℃, the structure of nanotube is uniform array. The inner diameter of the nanotube is about 35 nm, the thickness of the tube wall is about 12 nm, the length of the nanotube is about 1.5 μm. Therefore, the intrinsic impedance and charge transfer resistance of the sample are low, and the specific capacitance is 400 μF/cm2 as the current density is 0.1 mA/cm2.